PI - Motion Control & Nanopositioning Solutions

Piezo Actuators
Nanopositioning & Scanning Systems
Active Optics /
Steering Mirrors
Capacitive Position Sensors
Piezo Drivers & Nanopositioning Controllers
Hexapods /
Motorized Positioners
Photonics Alignment Solutions
Motion Controllers
Ceramic Linear Motors & Stages


Search Catalog
      GO   
 All Categories    Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Multi-Axis Stages with Aperture > Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology > View Items
 
    Printable Page     Email Email This Page     Save To Favorites Save To Favorites

Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology

Check up to five results to perform an action.

  • XYø XYZ and XY Versions
  • Precision Trajectory Control
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Travel Ranges to 200 µm
  • Clear Aperture to 66 x 66 mm
  • PICMA® High-Performance Multilayer Piezo Drives



Compare Items
   
  Results 1 - 6 of 6 1 

Item #

Item Name

Active Axes

Max. Normal Load

Travel Range

Closed Loop Linearity

Push Force Capacity (in Operating Direction)

Unloaded Resonant Frequency

P-517.2CL Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology XY 50 N N/A 0.03 % 200 N .450 kHz
P-527.2CL Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology XY 50 N N/A 0.03 % 200 N .350 kHz
P-517.3CD Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology XYZ 50 N N/A 0.03 % 200 N .450 kHz
P-527.3CD Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology XYZ 50 N N/A 0.03 % 200 N .350 kHz
P-517.RCD Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology XYΘZ 50 N N/A 0.03 % 200 N .450 kHz
P-527.RCD Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology XYΘZ 50 N N/A 0.03 % 200 N .350 kHz
  Results 1 - 6 of 6 1 


© 1996-2020 PI (Physik Instrumente) GmbH & Co. KG. All rights reserved. Specifications subject to change without notice.