- XYø XYZ and XY Versions
- Precision Trajectory Control
- Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
- Travel Ranges to 200µm
- Clear Aperture to 66 x 66 mm
- PICMA® High-Performance Multilayer Piezo Drives
P-5x7.3CD with one sub-D special connector for sensor and operating voltage.
