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 All Categories    Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology
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> Piezo Nanopositioning Systems > Multi-Axis Stages with Aperture > Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology > Item # P-527.3CD
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Item # P-527.3CD, Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology

  • XYø XYZ and XY Versions
  • Precision Trajectory Control
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Travel Ranges to 200µm
  • Clear Aperture to 66 x 66 mm
  • PICMA® High-Performance Multilayer Piezo Drives

    P-5x7.3CD with one sub-D special connector for sensor and operating voltage.


Active Axes


Open Loop Resolution

0.30 nm

Max. Normal Load

50 N

Travel Range

200 µm

Closed Loop Linearity

0.03 %

Push Force Capacity (in Operating Direction)

200 N

Unloaded Resonant Frequency

.350 kHz

Closed Loop Travel Range

200 µm

Integrated Feedback Sensor

3 x Capacitive

Closed Loop Resolution

0.50 nm

Full-Range Repeatability (typ.)

Z: ±1 nm
X: ±10
Y: ±10


Z: 15 N/µm ±20%, X: 1 N/µm ±20%, Y: 1 N/µm ±20%

Pull Force Capacity (in Operating Direction)

30 N

Electrical Capacitance

X: 9 µF ±20%, Y: 9 µF ±20%, Z: 6 µF ±20%

Dynamic Operating Current Coefficient (DOCC)

X: 5.5 µA/(Hz x µm), Y: 5.5 µA/(Hz x µm), Z: 62 µA/(Hz x µm)

Resonant Frequency at 500 g Load

X, Y: 190 Hz ±20%

Resonant Frequency at 2500 g Load

X, Y: 110 Hz ±20%

Operating Temperature Range

-20 to +80 °C

Voltage Connection

3 x VL

Sensor Connection

6 x C

Weight (with Cables)

1450 g ±5%

Body Material


Recommended Amplifier / Controller

H, F, L


Disk drive testing

Laser technology




Optical trapping

Scanning microscopy

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