- XYø XYZ and XY Versions
- Precision Trajectory Control
- Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
- Travel Ranges to 200 µm
- Clear Aperture to 66 x 66 mm
- PICMA® High-Performance Multilayer Piezo Drives
These multi-axis nanometer precision motion stages are available in 2-axis, 3-axis and 4-axis versions. They provide linear and rotary motion with nanometer precision – ideal for optical alignment and scanning applications in microscopy, semiconductor metrology, optics and photonics and laser technology.
Driven by high-performance piezoelectric stack actuators they provide high velocity, very high accuracy and fast acceleration with minimal step and settle times.
For laser processing and industrial precision automation applications where motion with 100’s of millimeters of travel is needed, other nanoposititioners such as the V-817 linear motor slides and integrated 2-axis long travel XY-tables are recommended. Motorized precision linear slides from PI are available with air bearings and mechanical precision bearings.
Computer Control, Programming, Software:
These multi-axis nanopositioning stages can be controlled and programmed by a computer via a digital nanopositioning motion controller of the E-727 multi-axis controller series. LabView drivers and MatLab examples are available for easy integration.
