Products Piezo Actuators Nanopositioning & Scanning Systems Active Optics / Steering Mirrors Capacitive Position Sensors Piezo Drivers & Nanopositioning Controllers Hexapods / Motorized Positioners Photonics Alignment Solutions Motion Controllers Ceramic Linear Motors & Stages	Search Catalog   By Keyword By Item #         All Categories    Multi-Axis Stages with Aperture All Categories > Nanopositioning: Piezo Stages, Actuators, Piezo Controllers, Sensors > Piezo Nanopositioning Systems > Multi-Axis Stages with Aperture     Multi-Axis Stages with Aperture Click on a Product to view details. Low-Profile OEM XY Piezo-Scanners for Imaging Applications (3) Ideal for Interlacing, CCD Resolution Enhancement Compact Size of only 45 x 45 x 6 mm Clear Aperture Highly Cost - Efficient Design 15 x 15 µm Travel Range Parallel - Kinematics Design for Higher Dynamics Compact XY Piezo-Nanopositioner with Aperture (2) Small Footprint : 60 x 60 mm 100 x 100 µm Travel Range Resolution to 0.8 nm For Cost-Sensitive Applications Clear Aperture: 20 x 20 mm PICMA ® High-Performance Multilayer Piezo Actuators Z-Stage also Available Low-Profile, Parallel-Kinematics XY Piezo Scanning Stages for Microscopy (4) Low Profile for Easy Integration: 16.5 mm Parallel Kinematics for Fast Response To 200 x 200 µm Travel Range 80 x 80 mm Clear Aperture PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime Low-Profile, XY Piezo Scanning Microscopy Stages with Parallel Metrology (3) Low Profile for Easy Integration: 16.5 mm Parallel Kinematics and Optional Parallel Metrology for Fast Response and Superior Multi-Axis Precision Choice of Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance) To 200 x 200 µm Travel Range Direct Drive Version for High-Speed Positioning & Scanning 80 x 80 mm Clear Aperture PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime Ultra-High-Speed, XY / XYZ Scanning Microscopy Stages with Parallel Metrology (2) Higher Speed Through Direct Drive Up to 2.2 kHz Resonant Frequency in X and Y 30 x 30 or 30 x 30 x 10 µm Travel Range 100 Picometers Resolution Capacitive Sensors for Highest Linearity Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision Active Runout Compensation 50 x 50 mm Clear Aperture Frictionless Precision Flexure Guiding System PICMA® High-Performance Multilayer Piezo Drives XY Piezo Nanopositioning / Scanning Stages With Parallel Metrology 100 x 100 µm Travel Range For XY Scanning & Positioning Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision Precision Flexure-Guiding System Integrated Capacitive Sensors for Resolution <0.3 nm 50 x 50 mm Clear Aperture Ultra-High Vacuum Version Available Ultra-Fast XY and XYZ Versions Available PICMA® High-Performance Multilayer Piezo Drives Ultra-Precision Trajectory, XY Nanopositioning Stages with Parallel Metrology Ultra-Precision Trajectory Control, Ideal for Surface Analysis and Scanning Microscopy Flatness in the Low Nanometer Range Parallel-Kinematics/Metrology for Enhanced Responsiveness and Automatic Runout Compensation 100 x 100 µm Travel Range Direct-Metrology Capacitive Sensors for Higher Precision 56 x 56 mm Clear Aperture PICMA®High-Performance Multilayer Piezo Drives Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology (6) XYø XYZ and XY Versions Precision Trajectory Control Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision Travel Ranges to 200 µm Clear Aperture to 66 x 66 mm PICMA® High-Performance Multilayer Piezo Drives NanoCube® XYZ Piezo Nano Alignment Systems with Parallel Metrology (3) 350 x 350 x 250 µm Closed-Loop Travel Range Parallel-Kinematics Design & Direct Capacitive Metrology for Higher Multi-Axis Accuracy Compact Design : 80 x 80 x 42 mm (Open & Closed-Loop Versions) 10 mm Clear Aperture PICMA® High-Performance Multilayer Piezo Drives 1 nm Resolution Ideal for Alignment and Photonics Packaging Applications Vacuum Compatible to 10-6 hPa PIMars™ XYZ Piezo Scanning- and Nanopositioning Stages with Parallel Metrology (4) To 300 x 300 x 300 µm Travel Range Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision Direct Metrology with Capacitive Sensors for Highest Precision 66 x 66 mm Clear Aperture Versions to 6-DOF Ultra-Fast XY and XYZ Versions Available Ultra-High-Vacuum Versions up to 10-9 hPa Available Invar, Super-Invar and Titanium Versions Available PICMA® High-Performance Multilayer Piezo Drives Large-Aperture, XY Piezo Nanopositioning / Scanning Stage with Parallel Metrology Precision Trajectory Control Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision For XY Scanning and Positioning 200 x 200 mm Clear Aperture 200 x 200 µm Range Closed-Loop Resolution <10 nm PICMA® High-Performance Multilayer Piezo Drives

© 1996-2020 PI (Physik Instrumente) GmbH & Co. KG. All rights reserved. Specifications subject to change without notice.