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All Categories > Nanopositioning: Piezo Stages,
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> Piezo Nanopositioning Systems > Multi-Axis Stages with Aperture
 
 

Multi-Axis Stages with Aperture


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Product Image - Low-Profile OEM XY Piezo-Scanners for Imaging Applications

Low-Profile OEM XY Piezo-Scanners for Imaging Applications


  • Ideal for Interlacing, CCD Resolution Enhancement
  • Compact Size of only 45 x 45 x 6 mm
  • Clear Aperture
  • Highly Cost - Efficient Design
  • 15 x 15 µm Travel Range
  • Parallel - Kinematics Design for Higher Dynamics
Product Image - Compact XY Piezo-Nanopositioner with Aperture

Compact XY Piezo-Nanopositioner with Aperture

(2)
  • Small Footprint : 60 x 60 mm
  • 100 x 100 µm Travel Range
  • Resolution to 0.8 nm
  • For Cost-Sensitive Applications
  • Clear Aperture: 20 x 20 mm
  • PICMA ® High-Performance Multilayer Piezo Actuators
  • Z-Stage also Available
Product Image - Low-Profile, XY Piezo Scanning Microscopy Stages with Parallel Metrology

Low-Profile, Parallel-Kinematics XY Piezo Scanning Stages for Microscopy

(4)
  • Low Profile for Easy Integration: 16.5 mm
  • Parallel Kinematics for Fast Response
  • To 200 x 200 µm Travel Range
  • 80 x 80 mm Clear Aperture
  • PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime
Product Image - Low-Profile, XY Piezo Scanning Microscopy Stages with Parallel Metrology

Low-Profile, XY Piezo Scanning Microscopy Stages with Parallel Metrology

(3)
  • Low Profile for Easy Integration: 16.5 mm
  • Parallel Kinematics and Optional Parallel Metrology for Fast Response and Superior Multi-Axis Precision
  • Choice of Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
  • To 200 x 200 µm Travel Range
  • Direct Drive Version for High-Speed Positioning & Scanning
  • 80 x 80 mm Clear Aperture
  • PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime
Product Image - Ultra-High-Speed, XY / XYZ Scanning Microscopy Stages with Parallel Metrology

Ultra-High-Speed, XY / XYZ Scanning Microscopy Stages with Parallel Metrology

(2)
  • Higher Speed Through Direct Drive
  • Up to 2.2 kHz Resonant Frequency in X and Y
  • 30 x 30 or 30 x 30 x 10 µm Travel Range
  • 100 Picometers Resolution
  • Capacitive Sensors for Highest Linearity
  • Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Active Runout Compensation
  • 50 x 50 mm Clear Aperture
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Multilayer Piezo Drives
Product Image - XY Piezo Nanopositioning / Scanning Stages with Parallel Metrology

XY Piezo Nanopositioning / Scanning Stages With Parallel Metrology


  • 100 x 100 µm Travel Range
  • For XY Scanning & Positioning
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Precision Flexure-Guiding System
  • Integrated Capacitive Sensors for Resolution <0.3 nm
  • 50 x 50 mm Clear Aperture
  • Ultra-High Vacuum Version Available
  • Ultra-Fast XY and XYZ Versions Available
  • PICMA® High-Performance Multilayer Piezo Drives
Product Image - Ultra-Precision Trajectory, XY Nanopositioning Stages with Parallel Metrology

Ultra-Precision Trajectory, XY Nanopositioning Stages with Parallel Metrology


  • Ultra-Precision Trajectory Control, Ideal for Surface Analysis and Scanning Microscopy
  • Flatness in the Low Nanometer Range
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness and Automatic Runout Compensation
  • 100 x 100 µm Travel Range
  • Direct-Metrology Capacitive Sensors for Higher Precision
  • 56 x 56 mm Clear Aperture
  • PICMA®High-Performance Multilayer Piezo Drives
Product Image - Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology

Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology

(6)
  • XYø XYZ and XY Versions
  • Precision Trajectory Control
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Travel Ranges to 200 µm
  • Clear Aperture to 66 x 66 mm
  • PICMA® High-Performance Multilayer Piezo Drives
Image

NanoCube® XYZ Piezo Nano Alignment Systems with Parallel Metrology

(2)
  • 350 x 350 x 250 µm Closed-Loop Travel Range
  • Parallel-Kinematics Design & Direct Capacitive Metrology for Higher Multi-Axis Accuracy
  • Compact Design : 80 x 80 x 42 mm (Open & Closed-Loop Versions)
  • 10 mm Clear Aperture
  • PICMA® High-Performance Multilayer Piezo Drives
  • 1 nm Resolution
  • Ideal for Alignment and Photonics Packaging Applications Vacuum Compatible to 10-6 hPa
Product Image - PIMars XYZ Piezo Scanning- and Nanopositioning Stages with Parallel Metrology

PIMars™ XYZ Piezo Scanning- and Nanopositioning Stages with Parallel Metrology

(4)
  • To 300 x 300 x 300 µm Travel Range
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • 66 x 66 mm Clear Aperture
  • Versions to 6-DOF
  • Ultra-Fast XY and XYZ Versions Available
  • Ultra-High-Vacuum Versions up to 10-9 hPa Available
  • Invar, Super-Invar and Titanium Versions Available
  • PICMA® High-Performance Multilayer Piezo Drives
P-545.xR8S PInano® XY (Z) Piezo Systems

P-545.xR8S PInano® XY (Z) Piezo Systems

(2)
Inexpensive Nanopositioning System for High-Resolution Microscopy

Inexpensive cost-optimized design with piezoresistive sensors
Including E-727 USB controller and software
Low profile for easy integration: 20 mm
Clear aperture for 3×1'' microscope slide, recessed insertable holder
Outstanding lifetime due to PICMA® piezo actuators
Subnanometer resolution, fast response time in the ms range

High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature ...


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