Inexpensive, with Low Profile

Low overall height of 20 mm for easy integration
E-709 digital piezo servo controller in the scope of delivery
USB, RS-232, analog interfaces
Compatible with MetaMorph imaging software

High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Extensive software for rapid start of productive operation
Thanks to support of MATLAB and NI LabVIEW as well as all common operating systems (Windows, Linux, and macOS), integration succeeds in virtually every environment – quickly and efficiently. Sophisticated programming examples and software tools such as PIMikroMove shorten the time to productive operation considerably.

• Small Footprint: 60 x 60 mm
• For Cost-Sensitive Applications
• 100 µm Travel
• Range Resolution to 0.2 nm
• Clear Aperture : 20 x 20 mm
• PICMA® High-Performance Multilayer Piezo Actuators

• Lower Profile for Easy Integration: 16.5 mm
• Z and Tip/Tilt Versions
• Fast Response
• 100 µm Linear Travel Range
• 80 x 80 mm Clear Aperture
• PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime
• Combination with Long Travel Microscopy Stages

• Lower Profile for Easy Integration: 16.5 mm
• Z and Tip/Tilt Versions
• Choice of Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
• 100 µm Linear Travel Range, 1 mrad Tilt
• 80 x 80 mm Clear Aperture
• PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime
• Ideal for fast Z-Stack Acquisition and 3D Deconvolution Imaging

• Precision Trajectory Control
• Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
• Travel Ranges to 200 µm / 4 mrad
• Clear Aperture 66 x 66 mm
• Direct Metrology with Capacitive Sensors for Highest Precision
• PICMA® High-Performance Multilayer Piezo Drives

Nanometer Resolution and Fast Step-and-Settle

Complete system with digital controller, software, and M32 QuickLock thread adapter
Idial for Automated Optical Axis Adjustment and Alignment
Highly dynamic step-and-settle for Z stacks
Ideal for Automated Optical Axis Adjustment and Alignment
Compatible with µManager, MetaMorph, and MATLAB
Parameter changing during operation

Highly accurate position measuring with incremental linear encoder
Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Nanometer precision and high feed force with PiezoWalk® walking drives
Several piezo actuators perform a walking motion in the PiezoWalk® walking drive that leads to forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.

Extensive software for rapid start of productive operation
Thanks to support of MATLAB and NI LabVIEW as well as all common operating systems (Windows, Linux, and macOS), integration succeeds in virtually every environment – quickly and efficiently. Sophisticated programming examples and software tools such as PIMikroMove shorten the time to productive operation considerably.

• Scans and Positions Objectives with Sub-nm Resolution
• High Linearity and Stability with Direct-Measuring Sensors
• Travel to 100 µm, fast Settling Time
• Ideal for Automated Optical Axis Adjustment and Alignment
• Very Straight Motion for Enhanced Focus Stability
• Ask about DIC Prism Holder Option
• Compatible with Metamorph™ Imaging Software
• Quick Lock Adapter for Easy Attachment

• Scans and Positions Objectives with Sub-nm Resolution
• High Linearity and Stability with Direct-Measuring Capacitive Sensors
• Travel to 800µm, Fast Response & Settling Time
• Frictionless Precision Flexure Guiding System
• Enhanced Guiding Precision for Better Focus Stability
• Controller Compatible with Metamorph™ Imaging Software
• Easy Attachment

These fast Z-nanopositioning / nanofocusing stages are used for surface metrology in semiconductor test and manufacturing, laser focus control for laser processing and high resolution microscopy applications. The high speed and responsiveness makes them ideal for ultra-fast and high precision autofocusing systems with nanometer resolution. If longer focusing ranges are required, a voice-coil motor driven nanofocusing stage is available as the V-308 PIFOC® fast focusing stage, providing 7mm travel and nanometer resolution. The P-725 nanofocusing piezo stages are driven by ultra-reliable PICMA® low-voltage piezo stacks that have proven their performance in 100 billion cycles of life testing for the Mars mission. Motion is amplified by a computer optimized flexure guiding system that is friction free and allows the piezo stage to achieve positioning resolution nanometer and sub-nanometer range. Computer Control / Software: The nanofocusing stages can be computer controlled via a digital nanopositioning motion controller of the E-709 series. LabView drivers and MatLab examples are available for easy integration.

Computer Control, Programming, Software:

The nanofocusing stages can be computer controlled via a digital nanopositioning motion controller of the E-709 series. LabView drivers and MatLab examples are available for easy integration.