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  • Product Image - Low-Profile Z/Tip/Tilt Piezo Nanopositioning Stages for Microscopy
  • Lower Profile for Easy Integration: 16.5 mm
  • Z and Tip/Tilt Versions
  • Fast Response
  • 100 µm Linear Travel Range
  • 80 x 80 mm Clear Aperture
  • PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime
  • Combination with Long Travel Microscopy Stages
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Item #

Item Name

Active Axes

Unloaded Resonant Frequency

Open Loop Resolution

Max. Normal Load

Travel Range

Closed Loop Linearity

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N/A Low-Profile 3-Axis Z/Tip/Tilt Piezo Nanopositioning Stages for Microscopy N/A Z N/A .410 kHz N/A 0.2 nm N/A 20 N N/A 100 µm N/A 0.50 % N/A Specifications, CAD / Drawings, Manuals, Videos
N/A Low-Profile 3-Axis Z/Tip/Tilt Piezo Nanopositioning Stages for Microscopy N/A Z N/A .410 kHz N/A 0.2 nm N/A 20 N N/A 100 µm N/A N/A Specifications, CAD / Drawings, Manuals, Videos
N/A Low-Profile 3-Axis Z/Tip/Tilt Piezo Nanopositioning Stages for Microscopy N/A ZΘXΘY N/A .410 kHz N/A 0.2 nm N/A 20 N N/A 100 µm N/A 0.50 % N/A Specifications, CAD / Drawings, Manuals, Videos
N/A Low-Profile 3-Axis Z/Tip/Tilt Piezo Nanopositioning Stages for Microscopy N/A ZΘXΘY N/A .410 kHz N/A 0.2 nm N/A 20 N N/A 100 µm N/A N/A Specifications, CAD / Drawings, Manuals, Videos
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