PIFOC® Long-Range, High-Speed Nanofocusing Z-Stages with Direct Metrology
Z-/Tip/Tilt Stages (with Aperture)
These fast Z-nanopositioning / nanofocusing stages are used for surface metrology in semiconductor test and manufacturing, laser focus control for laser processing and high resolution microscopy applications. The high speed and responsiveness makes them ideal for ultra-fast and high precision autofocusing systems with nanometer resolution. If longer focusing ranges are required, a voice-coil motor driven nanofocusing stage is available as the V-308 PIFOC® fast focusing stage, providing 7mm travel and nanometer resolution. The P-725 nanofocusing piezo stages are driven by ultra-reliable PICMA® low-voltage piezo stacks that have proven their performance in 100 billion cycles of life testing for the Mars mission. Motion is amplified by a computer optimized flexure guiding system that is friction free and allows the piezo stage to achieve positioning resolution nanometer and sub-nanometer range. Computer Control / Software: The nanofocusing stages can be computer controlled via a digital nanopositioning motion controller of the E-709 series. LabView drivers and MatLab examples are available for easy integration.
Computer Control, Programming, Software:
The nanofocusing stages can be computer controlled via a digital nanopositioning motion controller of the E-709 series. LabView drivers and MatLab examples are available for easy integration.
- Scans and Positions Objectives with Sub-nm Resolution
- High Linearity and Stability with Direct-Measuring Capacitive Sensors
- Travel to 800µm, Fast Response & Settling Time
- Frictionless Precision Flexure Guiding System
- Enhanced Guiding Precision for Better Focus Stability
- Controller Compatible with Metamorph™ Imaging Software
- Easy Attachment
These fast Z-nanopositioning / nanofocusing stages are used for surface metrology in semiconductor test and manufacturing, laser focus control for laser processing and high resolution microscopy applications. The high speed and responsiveness makes them ideal for ultra-fast and high precision autofocusing systems with nanometer resolution. If longer focusing ranges are required, a voice-coil motor driven nanofocusing stage is available as the V-308 PIFOC® fast focusing stage, providing 7mm travel and nanometer resolution. The P-725 nanofocusing piezo stages are driven by ultra-reliable PICMA® low-voltage piezo stacks that have proven their performance in 100 billion cycles of life testing for the Mars mission. Motion is amplified by a computer optimized flexure guiding system that is friction free and allows the piezo stage to achieve positioning resolution nanometer and sub-nanometer range. Computer Control / Software: The nanofocusing stages can be computer controlled via a digital nanopositioning motion controller of the E-709 series. LabView drivers and MatLab examples are available for easy integration.
Computer Control, Programming, Software:
The nanofocusing stages can be computer controlled via a digital nanopositioning motion controller of the E-709 series. LabView drivers and MatLab examples are available for easy integration.
