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 All Categories    Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors > Piezo Nanopositioning Systems > Z-/Tip/Tilt Stages (with Aperture) > Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology > View Items  
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Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology

 
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  • Precision Trajectory Control
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Travel Ranges to 200 µm / 4 mrad
  • Clear Aperture 66 x 66 mm
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • PICMA® High-Performance Multilayer Piezo Drives



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  Results 1 - 9 of 9 1 

Item #

Item Name

Active Axes

Open Loop Resolution

Max. Normal Load

Closed Loop Resolution

Travel Range

Closed Loop Linearity

Push Force Capacity (in Operating Direction)

Unloaded Resonant Frequency
P-528 Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology Z 0.2 nm 50 N 0.50 nm 50 µm
Up to 4 mrad 		0.03 % Z: 100 N .570 kHz
P-558.ZCD Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology Z 0.2 nm 50 N 0.50 nm 50 µm
Up to 4 mrad 		0.03 % Z: 100 N .570 kHz
P-518.ZCL Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology Z 0.4 nm 50 N 0.50 nm 100 µm
Up to 4 mrad 		0.03 % Z: 100 N .5 kHz
P-518.ZCD Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology Z 0.4 nm 50 N 0.50 nm 100 µm
Up to 4 mrad 		0.03 % Z: 100 N .5 kHz
P-528.ZCL Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology Z 0.60 nm 50 N 1.00 nm 200 µm
Up to 4 mrad 		0.03 % Z: 100 N .350 kHz
P-528.ZCD Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology Z 0.60 nm 50 N 1.00 nm 200 µm
Up to 4 mrad 		0.03 % Z: 100 N .350 kHz
P-558.TCD Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology ZΘXΘY 0.2 nm 50 N 0.50 nm 50 µm
Up to 4 mrad 		0.03 % Z: 100 N .570 kHz
P-518.TCD Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology ZΘXΘY 0.4 nm 50 N 0.50 nm 100 µm
Up to 4 mrad 		0.03 % Z: 100 N .5 kHz
P-528.TCD Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology ZΘXΘY 0.4 nm 50 N 1.00 nm 200 µm
Up to 4 mrad 		0.03 % Z: 100 N .350 kHz
  Results 1 - 9 of 9 1 


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