3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology
Z-/Tip/Tilt Stages (with Aperture)
- Precision Trajectory Control
- Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
- Travel Ranges to 200 µm / 4 mrad
- Clear Aperture 66 x 66 mm
- Direct Metrology with Capacitive Sensors for Highest Precision
- PICMA® High-Performance Multilayer Piezo Drives
Item # |
Item Name |
Active Axes |
Open Loop Resolution |
Max. Normal Load |
Closed Loop Resolution |
Travel Range |
Closed Loop Linearity |
Push Force Capacity (in Operating Direction) |
Unloaded Resonant Frequency |
Click Link for More Information |
|---|---|---|---|---|---|---|---|---|---|---|
| P-528 /Asset/pi_p528_blu_i4c_o.jpg | N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology | Active Axes N/A Z | Open Loop Resolution N/A 0.2 nm | Max. Normal Load N/A 50 N | Closed Loop Resolution N/A 0.50 nm | Travel Range N/A 50 µmUp to 4 mrad | Closed Loop Linearity N/A 0.03 % | Push Force Capacity (in Operating Direction) N/A Z: 100 N | Unloaded Resonant Frequency N/A .570 kHz |
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N/A Specifications, CAD / Drawings, Manuals, Videos |
| P-558.ZCD /Asset/pi_p528_blu_i4c_o.jpg | N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology | Active Axes N/A Z | Open Loop Resolution N/A 0.2 nm | Max. Normal Load N/A 50 N | Closed Loop Resolution N/A 0.50 nm | Travel Range N/A 50 µmUp to 4 mrad | Closed Loop Linearity N/A 0.03 % | Push Force Capacity (in Operating Direction) N/A Z: 100 N | Unloaded Resonant Frequency N/A .570 kHz |
Click Link for More Information
N/A Specifications, CAD / Drawings, Manuals, Videos |
| P-518.ZCL /Asset/pi_p528_blu_i4c_o.jpg | N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology | Active Axes N/A Z | Open Loop Resolution N/A 0.4 nm | Max. Normal Load N/A 50 N | Closed Loop Resolution N/A 0.50 nm | Travel Range N/A 100 µmUp to 4 mrad | Closed Loop Linearity N/A 0.03 % | Push Force Capacity (in Operating Direction) N/A Z: 100 N | Unloaded Resonant Frequency N/A .5 kHz |
Click Link for More Information
N/A Specifications, CAD / Drawings, Manuals, Videos |
| P-518.ZCD /Asset/pi_p528_blu_i4c_o.jpg | N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology | Active Axes N/A Z | Open Loop Resolution N/A 0.4 nm | Max. Normal Load N/A 50 N | Closed Loop Resolution N/A 0.50 nm | Travel Range N/A 100 µmUp to 4 mrad | Closed Loop Linearity N/A 0.03 % | Push Force Capacity (in Operating Direction) N/A Z: 100 N | Unloaded Resonant Frequency N/A .5 kHz |
Click Link for More Information
N/A Specifications, CAD / Drawings, Manuals, Videos |
| P-528.ZCL /Asset/pi_p528_blu_i4c_o.jpg | N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology | Active Axes N/A Z | Open Loop Resolution N/A 0.60 nm | Max. Normal Load N/A 50 N | Closed Loop Resolution N/A 1.00 nm | Travel Range N/A 200 µmUp to 4 mrad | Closed Loop Linearity N/A 0.03 % | Push Force Capacity (in Operating Direction) N/A Z: 100 N | Unloaded Resonant Frequency N/A .350 kHz |
Click Link for More Information
N/A Specifications, CAD / Drawings, Manuals, Videos |
| P-528.ZCD /Asset/pi_p528_blu_i4c_o.jpg | N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology | Active Axes N/A Z | Open Loop Resolution N/A 0.60 nm | Max. Normal Load N/A 50 N | Closed Loop Resolution N/A 1.00 nm | Travel Range N/A 200 µmUp to 4 mrad | Closed Loop Linearity N/A 0.03 % | Push Force Capacity (in Operating Direction) N/A Z: 100 N | Unloaded Resonant Frequency N/A .350 kHz |
Click Link for More Information
N/A Specifications, CAD / Drawings, Manuals, Videos |
| P-558.TCD /Asset/pi_p528_blu_i4c_o.jpg | N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology | Active Axes N/A ZΘXΘY | Open Loop Resolution N/A 0.2 nm | Max. Normal Load N/A 50 N | Closed Loop Resolution N/A 0.50 nm | Travel Range N/A 50 µmUp to 4 mrad | Closed Loop Linearity N/A 0.03 % | Push Force Capacity (in Operating Direction) N/A Z: 100 N | Unloaded Resonant Frequency N/A .570 kHz |
Click Link for More Information
N/A Specifications, CAD / Drawings, Manuals, Videos |
| P-518.TCD /Asset/pi_p528_blu_i4c_o.jpg | N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology | Active Axes N/A ZΘXΘY | Open Loop Resolution N/A 0.4 nm | Max. Normal Load N/A 50 N | Closed Loop Resolution N/A 0.50 nm | Travel Range N/A 100 µmUp to 4 mrad | Closed Loop Linearity N/A 0.03 % | Push Force Capacity (in Operating Direction) N/A Z: 100 N | Unloaded Resonant Frequency N/A .5 kHz |
Click Link for More Information
N/A Specifications, CAD / Drawings, Manuals, Videos |
| P-528.TCD /Asset/pi_p528_blu_i4c_o.jpg | N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology | Active Axes N/A ZΘXΘY | Open Loop Resolution N/A 0.4 nm | Max. Normal Load N/A 50 N | Closed Loop Resolution N/A 1.00 nm | Travel Range N/A 200 µmUp to 4 mrad | Closed Loop Linearity N/A 0.03 % | Push Force Capacity (in Operating Direction) N/A Z: 100 N | Unloaded Resonant Frequency N/A .350 kHz |
Click Link for More Information
N/A Specifications, CAD / Drawings, Manuals, Videos |
