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Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology
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Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology
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Precision Trajectory Control
Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
Travel Ranges to 200 µm / 4 mrad
Clear Aperture 66 x 66 mm
Direct Metrology with Capacitive Sensors for Highest Precision
PICMA® High-Performance Multilayer Piezo Drives
Results Per Page :
25
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200
Results 1 - 9 of 9
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Item #
Item Name
Active Axes
Open Loop Resolution
Max. Normal Load
Closed Loop Resolution
Travel Range
Closed Loop Linearity
Push Force Capacity (in Operating Direction)
Unloaded Resonant Frequency
P-528
Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology
Z
0.2
nm
50
N
0.50
nm
50
µm
Up to 4
mrad
0.03
%
Z: 100
N
.570
kHz
P-558.ZCD
Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology
Z
0.2
nm
50
N
0.50
nm
50
µm
Up to 4
mrad
0.03
%
Z: 100
N
.570
kHz
P-518.ZCL
Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology
Z
0.4
nm
50
N
0.50
nm
100
µm
Up to 4
mrad
0.03
%
Z: 100
N
.5
kHz
P-518.ZCD
Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology
Z
0.4
nm
50
N
0.50
nm
100
µm
Up to 4
mrad
0.03
%
Z: 100
N
.5
kHz
P-528.ZCL
Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology
Z
0.60
nm
50
N
1.00
nm
200
µm
Up to 4
mrad
0.03
%
Z: 100
N
.350
kHz
P-528.ZCD
Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology
Z
0.60
nm
50
N
1.00
nm
200
µm
Up to 4
mrad
0.03
%
Z: 100
N
.350
kHz
P-558.TCD
Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology
ZΘXΘY
0.2
nm
50
N
0.50
nm
50
µm
Up to 4
mrad
0.03
%
Z: 100
N
.570
kHz
P-518.TCD
Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology
ZΘXΘY
0.4
nm
50
N
0.50
nm
100
µm
Up to 4
mrad
0.03
%
Z: 100
N
.5
kHz
P-528.TCD
Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology
ZΘXΘY
0.4
nm
50
N
1.00
nm
200
µm
Up to 4
mrad
0.03
%
Z: 100
N
.350
kHz
Results 1 - 9 of 9
1
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