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Low-Profile Z/Tip/Tilt Piezo Nanopositioning Stages for Microscopy with Parallel Metrology
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Low-Profile Z/Tip/Tilt Piezo Nanopositioning Stages for Microscopy with Parallel Metrology
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Low-Profile Z/Tip/Tilt Piezo Nanopositioning Stages for Microscopy with Parallel Metrology
Check up to five results to perform an action.
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Lower Profile for Easy Integration: 16.5 mm
Z and Tip/Tilt Versions
Choice of Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
100 µm Linear Travel Range, 1 mrad Tilt
80 x 80 mm Clear Aperture
PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime
Ideal for fast Z-Stack Acquisition and 3D Deconvolution Imaging
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Results 1 - 2 of 2
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Item #
Item Name
Active Axes
Unloaded Resonant Frequency
Open Loop Resolution
Max. Normal Load
Closed Loop Resolution
Travel Range
Closed Loop Linearity
Push Force Capacity
P-541.ZCD
Low-Profile Z/Tip/Tilt Piezo Nanopositioning Stages for Microscopy with Parallel Metrology
Z
.410
kHz
0.2
nm
20
N
0.80
nm
100
µm
0.03
%
100
N
P-541.TCD
Low-Profile Z/Tip/Tilt Piezo Nanopositioning Stages for Microscopy with Parallel Metrology
ZΘXΘY
.410
kHz
0.2
nm
20
N
0.80
nm
100
µm
0.03
%
100
N
Results 1 - 2 of 2
1
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