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  • Product Image - Low-Profile Z/Tip/Tilt Piezo Nanopositioning Stages for Microscopy with Parallel Metrology
  • Lower Profile for Easy Integration: 16.5 mm
  • Z and Tip/Tilt Versions
  • Choice of Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
  • 100 µm Linear Travel Range, 1 mrad Tilt
  • 80 x 80 mm Clear Aperture
  • PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime
  • Ideal for fast Z-Stack Acquisition and 3D Deconvolution Imaging
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Item #

Item Name

Active Axes

Unloaded Resonant Frequency

Open Loop Resolution

Max. Normal Load

Closed Loop Resolution

Travel Range

Closed Loop Linearity

Push Force Capacity

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N/A Low-Profile 3-Axis Z/Tip/Tilt Piezo Nanopositioning Stages for Microscopy with Parallel Metrology N/A Z N/A .410 kHz N/A 0.2 nm N/A 20 N N/A 0.80 nm N/A 100 µm N/A 0.03 % N/A 100 N N/A Specifications, CAD / Drawings, Manuals, Videos
N/A Low-Profile 3-Axis Z/Tip/Tilt Piezo Nanopositioning Stages for Microscopy with Parallel Metrology N/A ZΘXΘY N/A .410 kHz N/A 0.2 nm N/A 20 N N/A 0.80 nm N/A 100 µm N/A 0.03 % N/A 100 N N/A Specifications, CAD / Drawings, Manuals, Videos
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