Item # P-615.30L, NanoCube® XYZ Piezo Nano Alignment Systems with Parallel Metrology On PI (Physik Instrumente) L.P.


Piezo Actuators
Nanopositioning & Scanning Systems
Active Optics / Steering Mirrors
Capacitive Position Sensors
Piezo Drivers & Nanopositioning Controllers
Hexapods / Motorized Positioners
Photonics Alignment Solutions
Motion Controllers
Ceramic Linear Motors & Stages

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	All Categories NanoCube® XYZ Piezo Nano Alignment Systems with Parallel Metrology


	Item # P-615.30L, NanoCube® XYZ Piezo Nano Alignment Systems with Parallel Metrology

350 x 350 x 250 µm Closed-Loop Travel Range
Parallel-Kinematics Design & Direct Capacitive Metrology for Higher Multi-Axis Accuracy
Compact Design : 80 x 80 x 42 mm (Open & Closed-Loop Versions)
10 mm Clear Aperture
PICMA® High-Performance Multilayer Piezo Drives
1 nm Resolution
Ideal for Alignment and Photonics Packaging Applications Vacuum Compatible to 10^-6 hPa

Specifications

Active Axes		XYZ

Open Loop Resolution		0.5 nm

Travel Range		400 µm

Unloaded Resonant Frequency		.210 kHz

Weight (without Cables)		570 g ±5%

Closed Loop Travel Range		350 x 350 x 250 µm

Integrated Feedback Sensor		Capacitive

Stiffness		0.13 N/µm in X, 0.13 N/µm in Y; 0.35 N/µm in Z

Max. Load		10 N in X, 10 N in Y; 20 N in Z

Electrical Capacitance		3.0 µF ±20% in X, 3.0 µF ±20% in Y, 6.0 µF ±20% in Z

Resonant Frequency at 100 g Load		140 Hz ±20% in X, 140 Hz ±20% in Y; 200 Hz ±20% in Z

Operating Temperature Range		-20 to 80 ºC

Voltage Connection		LEMO FFA.00.250

Body Material		Al

Recommended Amplifier / Controller		G, H

Application		Life sciences Micromachining Micromanipulation Photonics packaging Semiconductor test systems

Item # P-615.30L, NanoCube® XYZ Piezo Nano Alignment Systems with Parallel Metrology