• 350 x 350 x 250 µm Closed-Loop Travel Range
• Parallel-Kinematics Design & Direct Capacitive Metrology for Higher Multi-Axis Accuracy
• Compact Design : 80 x 80 x 42 mm (Open & Closed-Loop Versions)
• 10 mm Clear Aperture
• PICMA® High-Performance Multilayer Piezo Drives
• 1 nm Resolution
• Ideal for Alignment and Photonics Packaging Applications Vacuum Compatible to 10^-6 hPa

A newer version of this 3-axis linear nano-positioning stage is available as a 6-axis stage for nanopositioning applications in all 6-degrees of freedom.

More information on piezo flexure 6-axis stages. When long travel motion in the 10 to 100mm range is required, check out our long travel 6-axis stages based on hexapod robots