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 All Categories    NanoCube® XYZ Piezo Nano Alignment Systems with Parallel Metrology
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Multi-Axis Stages with Aperture > Item # P-615.30L
 
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Item # P-615.30L, NanoCube® XYZ Piezo Nano Alignment Systems with Parallel Metrology



Image
  • 350 x 350 x 250 µm Closed-Loop Travel Range
  • Parallel-Kinematics Design & Direct Capacitive Metrology for Higher Multi-Axis Accuracy
  • Compact Design : 80 x 80 x 42 mm (Open & Closed-Loop Versions)
  • 10 mm Clear Aperture
  • PICMA® High-Performance Multilayer Piezo Drives
  • 1 nm Resolution
  • Ideal for Alignment and Photonics Packaging Applications Vacuum Compatible to 10-6 hPa




 Specifications   

Active Axes

XYZ

Unloaded Resonant Frequency

.210 kHz

Weight (without Cables)

570 g ±5%

Integrated Feedback Sensor

Capacitive

Stiffness

0.13 N/µm in X, 0.13 N/µm in Y; 0.35 N/µm in Z

Max. Load

10 N in X, 10 N in Y; 20 N in Z

Electrical Capacitance

3.0 µF ±20% in X, 3.0 µF ±20% in Y, 6.0 µF ±20% in Z

Resonant Frequency at 100 g Load

140 Hz ±20% in X, 140 Hz ±20% in Y; 200 Hz ±20% in Z

Operating Temperature Range

-20 to 80 ºC

Voltage Connection

LEMO FFA.00.250

Body Material

Al

Recommended Amplifier / Controller

G, H

Application

Life sciences
Micromachining

Micromanipulation

Photonics packaging

Semiconductor test systems




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