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NanoCube® XYZ Piezo Nano Alignment Systems with Parallel Metrology
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Item # P-615.30L
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Item # P-615.30L, NanoCube® XYZ Piezo Nano Alignment Systems with Parallel Metrology
350 x 350 x 250 µm Closed-Loop Travel Range
Parallel-Kinematics Design & Direct Capacitive Metrology for Higher Multi-Axis Accuracy
Compact Design : 80 x 80 x 42 mm (Open & Closed-Loop Versions)
10 mm Clear Aperture
PICMA® High-Performance Multilayer Piezo Drives
1 nm Resolution
Ideal for Alignment and Photonics Packaging Applications Vacuum Compatible to 10
-6
hPa
Specifications
Active Axes
XYZ
Open Loop Resolution
0.5
nm
Travel Range
400
µm
Unloaded Resonant Frequency
.210
kHz
Weight (without Cables)
570 g ±5%
Closed Loop Travel Range
350 x 350 x 250
µm
Integrated Feedback Sensor
Capacitive
Stiffness
0.13 N/µm in X, 0.13 N/µm in Y; 0.35 N/µm in Z
Max. Load
10 N in X, 10 N in Y; 20 N in Z
Electrical Capacitance
3.0 µF ±20% in X, 3.0 µF ±20% in Y, 6.0 µF ±20% in Z
Resonant Frequency at 100 g Load
140 Hz ±20% in X, 140 Hz ±20% in Y; 200 Hz ±20% in Z
Operating Temperature Range
-20 to 80
ºC
Voltage Connection
LEMO FFA.00.250
Body Material
Al
Recommended Amplifier / Controller
G, H
Application
Life sciences
Micromachining
Micromanipulation
Photonics packaging
Semiconductor test systems
© 1996-2020 PI (Physik Instrumente) GmbH & Co. KG. All rights reserved. Specifications subject to change without notice.