- Low Profile for Easy Integration: 16.5 mm
- Parallel Kinematics for Fast Response
- To 200 x 200 µm Travel Range
- 80 x 80 mm Clear Aperture
- PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime
These 2-axis nanopositioning stages are driven by integrated piezo stacks with motion amplifiers. High resolution strain gauge sensors provide closed-loop nanopositioning performance in these 2-axis nanopositioning tables. These XY nanopositioning stages are a lower cost version of the capacitive feedback equipped P-541 and P-542 piezo XY stages. Piezo nanopositioners can be used in semiconductor metrology, super-resolution microscopy and imaging applications. For precision 2-axis linear motion with long travel XY-tables, check the V-741 linear motor nanopositioners. Motorized precision linear slides from PI are also available with air bearings and mechanical bearings. PI piezo flexure nanopositioners provide, zero-maintenance and a very long lifetime, because of the wear-free flexure guided design and the integrated PICMA® PZT piezo actuators that were life tested 100 Billion cycles for the Mars Mission.
Computer Control / Software:
These XY nanopositioning tables be computer controlled via a digital nanopositioning motion controller of the E-727 multi-axis controller series. LabView drivers and MatLab examples are available for easy integration.
How Do Piezoelectric Nanopositioning Stages Work?
Piezo Stages are precision mechanical motion devices, where the motion is generated by a solid state PZT actuators (piezoelectric linear actuator). Depending on the design, motion in linear, tilting and rotational form can be achieved: one-axis, two-axes (XY), 3-Axes (XYZ), 4-axes (XYZ-Theta), 5-axis (XYZ-tip/tilt) and 6-axis (XYZ, pitch, yaw and roll) can be achieved with very high precision. Nanopositioning is a combination of the words nano and positioning, meaning that motion with positioning resolution and precision in the nanometer range can be actuated and measured. For maximum accuracy, capacitance position feedback sensors are integrated into the piezo stages for feedback to the closed loop motion controller.
