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Ultra-High-Speed, XY / XYZ Scanning Microscopy Stages with Parallel Metrology
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Ultra-High-Speed, XY / XYZ Scanning Microscopy Stages with Parallel Metrology
Check up to five results to perform an action.
larger image
Higher Speed Through Direct Drive
Up to 2.2 kHz Resonant Frequency in X and Y
30 x 30 or 30 x 30 x 10 µm Travel Range
100 Picometers Resolution
Capacitive Sensors for Highest Linearity
Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
Active Runout Compensation
50 x 50 mm Clear Aperture
Frictionless Precision Flexure Guiding System
PICMA® High-Performance Multilayer Piezo Drives
Results Per Page :
25
50
100
200
Results 1 - 2 of 2
1
Item #
Item Name
Active Axes
Open Loop Resolution
Max. Normal Load
Travel Range
Closed Loop Linearity
Push Force Capacity (in Operating Direction)
Closed Loop Resolution
Unloaded Resonant Frequency
P-733.2DD
Ultra-High-Speed, XY / XYZ Scanning Microscopy Stages with Parallel Metrology
XY
0.1
nm
20
N
30 x 30
µm
30 x 30 x 10
µm
0.03
%
300
N
0.10
nm
2.230
kHz
P-733.3DD
Ultra-High-Speed, XY / XYZ Scanning Microscopy Stages with Parallel Metrology
XYZ
0.1
nm
20
N
30 x 30
µm
30 x 30 x 10
µm
0.03
%
300
N
0.10
nm
2.230
kHz
Results 1 - 2 of 2
1
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