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 All Categories    Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology
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> Piezo Nanopositioning Systems > Z-/Tip/Tilt Stages (with Aperture) > Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology > Item # P-528
 
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Item # P-528, Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology



  • Precision Trajectory Control
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Travel Ranges to 200 µm / 4 mrad
  • Clear Aperture 66 x 66 mm
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • PICMA® High-Performance Multilayer Piezo Drives




 Specifications   

Active Axes

Z

Max. Normal Load

50 N

Travel Range

Up to 4 mrad

Closed Loop Linearity

0.03 %

Push Force Capacity (in Operating Direction)

Z: 100 N

Unloaded Resonant Frequency

.570 kHz

Integrated Feedback Sensor

1 x Capacitive

Full-Range Repeatability (typ.)

±5 nm

Stiffness

Z: 4.0 µm ±20%

Pull Force Capacity (in Operating Direction)

Z: 50 N

Electrical Capacitance

View
6.5 µF ±20%

Dynamic Operating Current Coefficient (DOCC)

View
16.5 µA/(Hz x mrad)

Resonant Frequency at 500 g Load

410 Hz ±20%

Resonant Frequency at 2500 g Load

240 Hz ±20%

Operating Temperature Range

-20 to 80 ºC

Voltage Connection

VL (Version .ZCD with one Sub-D special connector only (sensor and operating voltage).)

Sensor Connection

2 x C (Version .ZCD with one Sub-D special connector only (sensor and operating voltage).)

Weight (with Cables)

1380 g ±5%

Body Material

Al

Recommended Amplifier / Controller

H, F, L / M

Application

Biotechnology
Disk drive testing

Laser technology

Lithography

Metrology

Micromanufacturing

Nanopositioning

Scanning microscopy


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