PI USA
PI USA
US Headquarters
16 Albert Street
Auburn, MA 01501
United States
Phone: 508-832-3456
Fax: 508-832-0506
Email: contact@pi-usa.us
Website: www.pi-usa.us
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  • Precision Trajectory Control
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Travel Ranges to 200 µm / 4 mrad
  • Clear Aperture 66 x 66 mm
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • PICMA® High-Performance Multilayer Piezo Drives
Product Image - Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology
Unit of Measure
1 

Item #

Item Name

Active Axes

Open Loop Resolution

Max. Normal Load

Closed Loop Resolution

Travel Range

Closed Loop Linearity

Push Force Capacity (in Operating Direction)

Unloaded Resonant Frequency

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P-528 N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology N/A Z N/A 0.2 nm N/A 50 N N/A 0.50 nm N/A 50 µmUp to 4 mrad N/A 0.03 % N/A Z: 100 N N/A .570 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
P-558.ZCD N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology N/A Z N/A 0.2 nm N/A 50 N N/A 0.50 nm N/A 50 µmUp to 4 mrad N/A 0.03 % N/A Z: 100 N N/A .570 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
P-518.ZCL N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology N/A Z N/A 0.4 nm N/A 50 N N/A 0.50 nm N/A 100 µmUp to 4 mrad N/A 0.03 % N/A Z: 100 N N/A .5 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
P-518.ZCD N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology N/A Z N/A 0.4 nm N/A 50 N N/A 0.50 nm N/A 100 µmUp to 4 mrad N/A 0.03 % N/A Z: 100 N N/A .5 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
P-528.ZCL N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology N/A Z N/A 0.60 nm N/A 50 N N/A 1.00 nm N/A 200 µmUp to 4 mrad N/A 0.03 % N/A Z: 100 N N/A .350 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
P-528.ZCD N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology N/A Z N/A 0.60 nm N/A 50 N N/A 1.00 nm N/A 200 µmUp to 4 mrad N/A 0.03 % N/A Z: 100 N N/A .350 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
P-558.TCD N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology N/A ZΘXΘY N/A 0.2 nm N/A 50 N N/A 0.50 nm N/A 50 µmUp to 4 mrad N/A 0.03 % N/A Z: 100 N N/A .570 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
P-518.TCD N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology N/A ZΘXΘY N/A 0.4 nm N/A 50 N N/A 0.50 nm N/A 100 µmUp to 4 mrad N/A 0.03 % N/A Z: 100 N N/A .5 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
P-528.TCD N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology N/A ZΘXΘY N/A 0.4 nm N/A 50 N N/A 1.00 nm N/A 200 µmUp to 4 mrad N/A 0.03 % N/A Z: 100 N N/A .350 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
Unit of Measure
1