Compact Parallel-Kinematic Piezo System for Nanopositioning and Fiber Alignment
Parallel-kinematic design for the highest stiffness in all spatial directions Highly dynamic motion due to high resonant frequencies even with loads up to 100 g Innovative product design for flexible use due to single mounting platform. Only nanopositioner available on the market with ID chip functionality Smallest and lightest NanoCube® with 100 µm travel range on the market
Subnanometer resolution with capacitive sensors Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.