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6-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage with Parallel Metrology
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Item # P-587.6CD
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Item # P-587.6CD, 6-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage with Parallel Metrology
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For Scanning and Positioning in all Six Degrees of Freedom
800 x 800 x 200 µm Linear Range
Up to 10 mad Rotational Range
Precision Trajectory Control
Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
Direct Metrology with Capacitive Sensors for Highest Precision
ID-Chip for Auto Calibration Function
PICMA® High - Performance Multilayer Piezo Drives
Specifications
Active Axes
XYZ, θ
X
, θ
Y
, θ
Z
Max. Normal Load
50
N
Closed Loop Resolution
2.00
nm
Closed Loop Travel Range
800
µm
Closed Loop Travel in θ
X
, θ
Y
, θ
Z
3 x 3 x 10
mrad
Integrated Feedback Sensor
Capacitive
Body Material
Al / Invar
Closed Loop Linearity (typ.)
XY: 0.004% (30 nm) Z: 0.01% (20 nm) rotations: 0.2% (2 µrad)
Electrical Capacitance (XY)
2 x 42 µF ±20% / axis
Electrical Capacitance (Z)
4 x 4.5 µF ±20%
Resonant Frequency XY (at 600 g load)
103 Hz ±20%
Resonant Frequency Z (at 600 g load)
220 Hz ±20%
Resonant Frequency θ
X
,θ
Y
(at 600 g load)
308 Hz ±20%
Resonant Frequency θ
Z
(at 600 g load)
140 Hz ±20%
Crosstalk, All Axes at Full Range
1
µrad
Operating Temperature Range
-20 to +80
°C
Voltage and Sensor Connection
ID
Weight (without Cables)
7.2 kg ±5%
Recommended Amplifier / Controller
E-710.6CD
Application
Metrology
Nanoimprinting
Nanomanufacturing
Nanopositioning
Precision mask and wafer alignment
Scanning interferometry
Semiconductor test equipment
Surface structure analysis
Travel Range
800
µm
Unloaded Resonant Frequency
0.250
kHz
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© 1996-2020 PI (Physik Instrumente) GmbH & Co. KG. All rights reserved. Specifications subject to change without notice.
