Nanopositioning & Scanning Systems
Active Optics /
Capacitive Position Sensors
Piezo Drivers & Nanopositioning Controllers
Photonics Alignment Solutions
Ceramic Linear Motors & Stages
By Item #
P-616 NanoCube® Nanopositioners
Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
Piezo Nanopositioning Systems
Multi-Axis Stages without Aperture
Item # P-616.3C
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Item # P-616.3C, P-616 NanoCube® Nanopositioners
Compact Parallel-Kinematic Piezo System for Nanopositioning and Fiber Alignment
Parallel-kinematic design for the highest stiffness in all spatial directions
Highly dynamic motion due to high resonant frequencies even with loads up to 100 g
Innovative product design for flexible use due to single mounting platform.
Only nanopositioner available on the market with ID chip functionality
Smallest and lightest NanoCube® with 100 µm travel range on the market
Subnanometer resolution with capacitive sensors
Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.
Automatic configuration and fast component exchange
Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.
X, Y, Z
Open Loop Travel Range at -20 to 120 V
110 µm/ axis
Open Loop Travel Range at -20 to 120 V Tolerance (±)
Closed Loop Travel Range
100 µm/ axis
Closed Loop Travel Range Tolerance (±)
Open Loop Resolution 1 s (typ.)
Closed Loop Resolution 1 s (typ.)
Linearity Error (typ.)
Travel Range Bidirectional Repeatability, 1 s, 10 % (typ.)
Travel Range Bidirectional Repeatability 1 s, 100 % (typ.)
Stiffness Tolerance (±)
No Load Resonant Frequency (X/Y/Z)
No Load Resonant Frequency (X/Y/Z) Tolerance (±)
Resonant Frequency with 30 g Load (X/Y/Z)
Resonant Frequency with 30 g Load (X/Y/Z) Tolerance (±)
Resonant Frequency with 100 g Load (X/Y/Z)
Resonant Frequency with 100 g Load (X/Y/Z) Tolerance (±)
Push/Pull Force Capacity (max.)
Max. Permissible Torque
1.5 / axis
Electrical Capacitance Tolerance (±)
Operating Temperature Range
-20 to 80
40 × 40 × 40
Moved Mass without Load
Mass without Cable
Mass with Cable
D-sub 25W3 (m)
Fields of Application
Fiber positioning and alignment
Nanotechnology and nanomanufacturing
Photonics / integrated optics
Suitable for sophisticated vacuum applications
All components used in the piezo systems are excellently suited for use in vacuum. No lubricant or grease is necessary for operating. Polymer-free piezo systems allow particularly low outgas rates.
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.
High dynamics multi-axis operation due to parallel kinematics
In a parallel-kinematic multi-axis system, all actuators act on a common platform. The minimum mass inertia and the identical design of all axes allow fast, dynamic, and nevertheless precision motion.
The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.
All specifications based on room temperature (22 ºC ±3 ºC).
P-616 NanoCube® Nanopositioners - 3
P-616 NanoCube® Nanopositioners - 4
P-616 NanoCube® Nanopositioners - 5
CADs & Drawings, Manuals, Videos, Specs
CADs & Drawings, Manuals, Videos, Specs
© 1996-2020 PI (Physik Instrumente) GmbH & Co. KG. All rights reserved. Specifications subject to change without notice.