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PIHera® Long-Range XY Piezo Nanopositioning Stages with Direct Metrology
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PIHera® Long-Range XY Piezo Nanopositioning Stages with Direct Metrology
Check up to five results to perform an action.
larger image
XY-Travel to 1000 µm
Compact Design
Resolution <1 nm
Frictionless Precision Flexure Guiding System
PICMA® High-Performance Multilayer Piezo Drives
Direct Metrology with Capacitive Sensors for Highest Precision
Up to 0.02% Position Accuracy
X, XY, Z, XYZ Versions
Vacuum-Compatible Versions
Results Per Page :
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Results 1 - 6 of 6
1
Item #
Item Name
Active Axes
Open Loop Resolution
Max. Normal Load
Closed Loop Linearity
Stiffness
Closed Loop Resolution
Push Force Capacity (in X and Y)
P-620.2CD
PIHera® Long-Range XY Piezo Nanopositioning Stages with Direct Metrology
XY
0.1
nm
10
N
0.02
%
0.40
N/µm
0.20
nm
10
N
P-621.2CD
PIHera® Long-Range XY Piezo Nanopositioning Stages with Direct Metrology
XY
0.2
nm
10
N
0.02
%
0.25
N/µm
0.40
nm
10
N
P-622.2CD
PIHera® Long-Range XY Piezo Nanopositioning Stages with Direct Metrology
XY
0.4
nm
10
N
0.02
%
0.20
N/µm
0.70
nm
10
N
P-625.2CD
PIHera® Long-Range XY Piezo Nanopositioning Stages with Direct Metrology
XY
0.5
nm
10
N
0.03
%
0.10
N/µm
1.40
nm
10
N
P-628.2CD
PIHera® Long-Range XY Piezo Nanopositioning Stages with Direct Metrology
XY
0.5
nm
10
N
0.03
%
0.05
N/µm
3.50
nm
10
N
P-62x.20L
PIHera® Long-Range XY Piezo Nanopositioning Stages with Direct Metrology
XY
N/A
N/A
N/A
N/A
N/A
N/A
Results 1 - 6 of 6
1
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