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  • Product Image - PIHera Long-Range XY Piezo Nanopositioning Stages with Direct Metrology
  • XY-Travel to 1000 µm
  • Compact Design
  • Resolution <1 nm
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Multilayer Piezo Drives
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Up to 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions
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Item #

Item Name

Active Axes

Open Loop Resolution

Max. Normal Load

Closed Loop Linearity

Stiffness

Closed Loop Resolution

Push Force Capacity (in X and Y)

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N/A PIHera® Long-Travel Piezolectric XY-Table for Nanopositioning, Direct Metrology N/A XY N/A 0.1 nm N/A 10 N N/A 0.02 % N/A 0.40 N/µm N/A 0.20 nm N/A 10 N N/A Specifications, CAD / Drawings, Manuals, Videos
N/A PIHera® Long-Travel Piezolectric XY-Table for Nanopositioning, Direct Metrology N/A XY N/A 0.2 nm N/A 10 N N/A 0.02 % N/A 0.25 N/µm N/A 0.40 nm N/A 10 N N/A Specifications, CAD / Drawings, Manuals, Videos
N/A PIHera® Long-Travel Piezolectric XY-Table for Nanopositioning, Direct Metrology N/A XY N/A 0.4 nm N/A 10 N N/A 0.02 % N/A 0.20 N/µm N/A 0.70 nm N/A 10 N N/A Specifications, CAD / Drawings, Manuals, Videos
N/A PIHera® Long-Travel Piezolectric XY-Table for Nanopositioning, Direct Metrology N/A XY N/A 0.5 nm N/A 10 N N/A 0.03 % N/A 0.10 N/µm N/A 1.40 nm N/A 10 N N/A Specifications, CAD / Drawings, Manuals, Videos
N/A PIHera® Long-Travel Piezolectric XY-Table for Nanopositioning, Direct Metrology N/A XY N/A 0.5 nm N/A 10 N N/A 0.03 % N/A 0.05 N/µm N/A 3.50 nm N/A 10 N N/A Specifications, CAD / Drawings, Manuals, Videos
N/A PIHera® Long-Travel Piezolectric XY-Table for Nanopositioning, Direct Metrology N/A XY N/A N/A N/A N/A N/A N/A N/A Specifications, CAD / Drawings, Manuals, Videos
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