• Ultra-High-Performance Closed-Loop Scanner for AFM/SPM
  • Compact Manipulation Tool for Nanotechnology
  • Resonant Frequency 9.8 kHz
  • Ultra-High-Precision Capacitive Feedback
  • Parallel-Motion Metrology for Highest Linearity and Stability
  • 50 Picometers Resolution
  • 5 x 5 x 5 µm Travel Range
  • Very Small Package
  • Rugged Design
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Item #

Item Name

Active Axes

Open Loop Resolution

Max. Normal Load

Travel Range

Closed Loop Resolution

Closed Loop Linearity (X, Y, typ.)

Unloaded Resonant Frequency

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N/A PicoCube® High-Speed, XY / XYZ Tables, Piezoelectric, for Nanotechnology, SPM, AFM N/A XYZ N/A 0.1 nm N/A 10 N N/A 5 x 5 x 5 µm N/A 0.10 nm N/A 1 nm N/A 3.1 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A PicoCube® High-Speed, XY / XYZ Tables, Piezoelectric, for Nanotechnology, SPM, AFM N/A XY N/A 0.1 nm N/A 10 N N/A 5 x 5 x 5 µm N/A 0.10 nm N/A 1 nm N/A 4.2 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
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