Subnanometer resolution with capacitive sensors Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.
Automatic configuration and fast component exchange Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.
Ideal for pixel sub-stepping in image enhancement Compact design: 45 mm × 45 mm × 6 mm with clear aperture Very cost-effective design Parallel kinematics for enhanced dynamics and better multi-axis accuracy