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All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Single Axis Piezo Nanopositioning Systems
 
 

Single Axis Piezo Nanopositioning Systems


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P-630 High Dynamics Piezo Nanopositioning System

P-630 High Dynamics Piezo Nanopositioning System

(2)
1 Axis with Large Aperture

Narrow and flat design

Subnanometer resolution with capacitive sensors
Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

Automatic configuration and fast component exchange
Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.
Product Image - High-Load Piezo-Driven Nanopositioning Stages with Direct Metrology

High-Load Piezo-Driven Nanopositioning Stages with Direct Metrology

(3)
  • 10 kg Load Capacity
  • 1 nm Lateral Guiding Precision
  • Resolution <1 nm
  • PICMA® High-Performance Multilayer Piezo Drives
  • Fast Response
  • 75 µm Travel Range
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Frictionless Precision Flexure Guiding System
Product Image - PIHera Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology

PIHera® Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology

(6)
  • Travel to 950 µm
  • Compact Design
  • Resolution <1 nm
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Piezo Drives
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Up to 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions
P-712 Linear Piezo Scanners

P-712 Linear Piezo Scanners

(2)
Compact OEM System

Compact design with low profile, 40 mm × 40 mm × 6 mm
PICMA® high-power actuators
P-713 XY Linear Piezo Scanners

P-713 XY Linear Piezo Scanners

(2)
Cost-Effective OEM System with Low Profile

Ideal for pixel sub-stepping in image enhancement
Compact design: 45 mm × 45 mm × 6 mm with clear aperture
Very cost-effective design
Parallel kinematics for enhanced dynamics and better multi-axis accuracy
Product Image - Piezo NanoAutomation Stages with Direct Metrology

Piezo NanoAutomation® Stages with Direct Metrology

(2)
  • Ultra-Fast Response
  • Ultra-Precise Trajectory Control
  • Digital Controllers with Fast FiberLink Interface Available
  • ID-Chip for AutoCalibrate Function
  • Direct-Metrology Capacitive Sensors for Highest Precision
  • 0.1 nm Resolution
  • PICMA® High-Performance Multilayer Piezo Drives
Product Image - LISA Piezo NanoAutomation Stages / Actuators with Direct Metrology

LISA Piezo NanoAutomation® Stages / Actuators with Direct Metrology

(3)
  • Unique Design: Both Stage and Actuator
  • Frictionless Precision Flexure Guiding System
  • 0.05 nm Resolution
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Ultra-Fast Response, Very Compact
  • PICMA®High-Performance Multilayer Piezo Drives
  • ID-Chip for Auto Calibrate Function
  • Vacuum Versions Available


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