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High-Load Piezo-Driven Nanopositioning Stages with Direct Metrology
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High-Load Piezo-Driven Nanopositioning Stages with Direct Metrology
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10 kg Load Capacity
1 nm Lateral Guiding Precision
Resolution <1 nm
PICMA® High-Performance Multilayer Piezo Drives
Fast Response
75 µm Travel Range
Direct Metrology with Capacitive Sensors for Highest Precision
Frictionless Precision Flexure Guiding System
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Results 1 - 3 of 3
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Item #
Item Name
Active Axes
Max. Normal Load
Travel Range
Closed Loop Linearity
Push Force Capacity (in Operating Direction)
Unloaded Resonant Frequency
P-750.00
High-Load Piezo-Driven Nanopositioning Stages with Direct Metrology
X
100
N
N/A
N/A
800
N
.600
kHz
P-750.10
High-Load Piezo-Driven Nanopositioning Stages with Direct Metrology
X
100
N
N/A
0.10
%
800
N
.600
kHz
P-750.20
High-Load Piezo-Driven Nanopositioning Stages with Direct Metrology
X
100
N
N/A
0.03
%
800
N
.600
kHz
Results 1 - 3 of 3
1
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