PI - Motion Control & Nanopositioning Solutions

Piezo Actuators
Nanopositioning & Scanning Systems
Active Optics /
Steering Mirrors
Capacitive Position Sensors
Piezo Drivers & Nanopositioning Controllers
Hexapods /
Motorized Positioners
Photonics Alignment Solutions
Motion Controllers
Ceramic Linear Motors & Stages 


Search Catalog
      GO   
 All Categories    High-Load Piezo-Driven Nanopositioning Stages with Direct Metrology
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors > Piezo Nanopositioning Systems > Single Axis Piezo Nanopositioning Systems > High-Load Piezo-Driven Nanopositioning Stages with Direct Metrology > View Items  
    Printable Page     Email Email This Page     Save To Favorites Save To Favorites

High-Load Piezo-Driven Nanopositioning Stages with Direct Metrology

 
Check up to five results to perform an action.

  • 10 kg Load Capacity
  • 1 nm Lateral Guiding Precision
  • Resolution <1 nm
  • PICMA® High-Performance Multilayer Piezo Drives
  • Fast Response
  • 75 µm Travel Range
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Frictionless Precision Flexure Guiding System



Compare Items
   
  Results 1 - 3 of 3 1 

Item #

Item Name

Active Axes

Open Loop Resolution

Max. Normal Load

Travel Range

Closed Loop Linearity

Push Force Capacity (in Operating Direction)

Unloaded Resonant Frequency
P-750.00 High-Load Piezo-Driven Nanopositioning Stages with Direct Metrology X 1.00 nm 100 N 75 µm N/A 800 N .600 kHz
P-750.10 High-Load Piezo-Driven Nanopositioning Stages with Direct Metrology X 1.00 nm 100 N 75 µm 0.10 % 800 N .600 kHz
P-750.20 High-Load Piezo-Driven Nanopositioning Stages with Direct Metrology X 1.00 nm 100 N 75 µm 0.03 % 800 N .600 kHz
  Results 1 - 3 of 3 1 


© 1996-2020 PI (Physik Instrumente) GmbH & Co. KG. All rights reserved. Specifications subject to change without notice.