• 10 kg Load Capacity
  • 1 nm Lateral Guiding Precision
  • Resolution <1 nm
  • PICMA® High-Performance Multilayer Piezo Drives
  • Fast Response
  • 75 µm Travel Range
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Frictionless Precision Flexure Guiding System
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Item #

Item Name

Active Axes

Open Loop Resolution

Max. Normal Load

Travel Range

Closed Loop Linearity

Push Force Capacity (in Operating Direction)

Unloaded Resonant Frequency

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N/A High-Load Piezo-Driven Nanopositioning Linear Translation Stages with Direct Metrology N/A X N/A 1.00 nm N/A 100 N N/A 75 µm N/A N/A 800 N N/A .600 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A High-Load Piezo-Driven Nanopositioning Linear Translation Stages with Direct Metrology N/A X N/A 1.00 nm N/A 100 N N/A 75 µm N/A 0.10 % N/A 800 N N/A .600 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A High-Load Piezo-Driven Nanopositioning Linear Translation Stages with Direct Metrology N/A X N/A 1.00 nm N/A 100 N N/A 75 µm N/A 0.03 % N/A 800 N N/A .600 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
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