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P-630 High Dynamics Piezo Nanopositioning System

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1 Axis with Large Aperture

Narrow and flat design

Subnanometer resolution with capacitive sensors
Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

Automatic configuration and fast component exchange
Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.




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Item Name

Closed Loop Linearity Error

P-630.XCD P-630 High Dynamics Piezo Nanopositioning System 0.02 %
P-631.XCD P-630 High Dynamics Piezo Nanopositioning System 0.02 %
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