- Travel to 950 µm
- Compact Design
- Resolution <1 nm
- Frictionless Precision Flexure Guiding System
- PICMA® High-Performance Piezo Drives
- Direct Metrology with Capacitive Sensors for Highest Precision
- Up to 0.02% Position Accuracy
- X, XY, Z, XYZ Versions
- Vacuum-Compatible Versions
The PIHera nanopositioning linear stages are driven by ultra-reliable PICMA® low-voltage piezo stacks that have proven their performance in 100 billion cycles of life testing for the Mars mission. These nanopositioning stages use piezo amplified flexures for longer travel in a more compact package and can resolve positions in the sub-nanometer range. The large variety of travel ranges and sizes makes them ideal for OEM and also cutting edge research applications. 1-axis and 2-axis (XY) stages as well as Z-axis stages are standard and can be combined to compact XZ or XYZ 3-axis stage systems. Piezoelectric nanopositioning stages provide faster response than other types of positioning stages with millisecond step and settle achievable – a critical performance parameter for semiconductor test and metrology, photonics alignment, laser control and quantum computing applications. The high velocity, step performance and responsiveness combined with the high resolution and accuracy makes piezo nanopositioning stages the preferred positioning stage choice in highly dynamic processes such as high bandwidth scanning, error tracking and compensation, fast focusing, optical communication etc.
PIHera Piezoelectric Nanopositioning Stage features:
- Sub-nanometer position resolution
- Closed Loop Operation with Nanometer Range Repeatability
- Direct Metrology Capacitive Feedback for – Higher Precision, Especially Important for Semiconductor Metrology Applications
- Excellent Trajectory Control with Flexure Guides.
- 1-Axis, 2-Axis and 3-Axis Motion (X, XY, XYZ)
- Extended Piezoelectric Travel Range up to 1500µm (closed loop), 1800µm (open loop)
- Flexure Design without Play and Backlash Provides Higher Stiffness, Resonant Frequency and Higher Bandwidth
- Standard Versions for Ambient and Vacuum Versions Offered. UHV Versions on request.
How to Program a PIheara Piezo Stage
These ultra-precision linear translation stages can be computer controlled via a digital nanopositioning motion controller of the E-709 series, or a multi-axis motion controller of the E-727 series. LabView drivers and MatLab examples are available for easy integration.
How Do Piezo Stages Work?
Piezo Stages are precision mechanical motion devices, where the motion is generated by a solid state PZT actuators (piezoelectric linear actuator). Depending on the design, motion in linear, tilting and rotational form can be achieved: one-axis, two-axes (XY), 3-Axes (XYZ), 4-axes (XYZ-Theta), 5-axis (XYZ-tip/tilt) and 6-axis (XYZ, pitch, yaw and roll) can be achieved with very high precision. Nanopositioning is a combination of the words nano and positioning, meaning that motion with positioning resolution and precision in the nanometer range can be actuated and measured. For maximum accuracy, capacitance position feedback sensors are integrated into the piezo stages for feedback to the closed loop motion controller.
