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PIHera® Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology
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PIHera® Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology
Check up to five results to perform an action.
larger image
Travel to 950 µm
Compact Design
Resolution <1 nm
Frictionless Precision Flexure Guiding System
PICMA® High-Performance Piezo Drives
Direct Metrology with Capacitive Sensors for Highest Precision
Up to 0.02% Position Accuracy
X, XY, Z, XYZ Versions
Vacuum-Compatible Versions
Results Per Page :
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Results 1 - 6 of 6
1
Item #
Item Name
Active Axes
Open Loop Resolution
Max. Normal Load
Travel Range
Closed Loop Linearity
Unloaded Resonant Frequency
Push Force Capacity (X)
P-620.1CD
PIHera® Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology
X
0.1
nm
10
N
60
µm
0.02
%
1.24
kHz
10
N
P-621.1CD
PIHera® Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology
X
0.2
nm
10
N
120
µm
0.02
%
0.800
kHz
10
N
P-622.1CD
PIHera® Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology
X
0.4
nm
10
N
300
µm
0.02
%
0.400
kHz
10
N
P-625.1CD
PIHera® Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology
X
0.5
nm
10
N
600
µm
0.03
%
.215
kHz
10
N
P-628.1CD
PIHera® Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology
X
0.5
nm
10
N
950
µm
0.03
%
.125
kHz
10
N
P-62x.10L
PIHera® Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology
X
N/A
N/A
N/A
N/A
N/A
N/A
Results 1 - 6 of 6
1
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