- Ultra-Fast Response
- Ultra-Precise Trajectory Control
- Digital Controllers with Fast FiberLink Interface Available
- ID-Chip for AutoCalibrate Function
- Direct-Metrology Capacitive Sensors for Highest Precision
- 0.1 nm Resolution
- PICMA® High-Performance Multilayer Piezo Drives
These ultra-high-precision linear piezo nanopositioning stages are driven by ultra-reliable PICMA® low-voltage piezo stacks that have proven their performance in 100 billion cycles of life testing for the Mars mission. Motion is generated by integrated direct-drive piezo that can resolve positions in the 0.1 nanometer range. The extremely high guidance precision is achieved with computer designed flexure guides. The nanopositioning stage performance makes them ideal for OEMs looking to automate metrology applications for semiconductor, photonics, mass storage or quantum computing applications in industry as well as for cutting-edge research. Piezoelectric nanopositioning stages provide faster response, step and settle performance than other types of drive technologies. Millisecond step and settle is a critical performance parameter in any modern precision automation application. The high velocity, step performance and responsiveness combined with the high resolution and accuracy makes piezo nanopositioning stages the preferred positioning stage choice in highly dynamic processes such as high bandwidth scanning, error tracking and compensation, fast focusing, optical communication etc.
- 1/10 nanometer positioning resolution
- Closed Loop Operation with Nanometer Range Repeatability
- Direct Metrology Capacitive Feedback for – Higher Precision, Especially Important for Semiconductor Metrology
- Applications
- Excellent Trajectory Control with Flexure Guides.
- Direct Drive Design for Faster Response and Higher Bandwidth
- Highly Stiff Flexure Design without Play and Backlash Provides Higher Bandwidth and Higher Path Fidelity
- Standard Versions for Ambient and Vacuum Versions Offered. UHV Versions on request.
How to Program a Piezo Stage: These ultra-precision linear translation stages can be computer controlled via a digital nanopositioning motion controller of the E-709 series. LabView drivers and MatLab examples are available for easy integration.
How Do Piezo Stages Work? Piezo Stages are precision mechanical motion devices, where the motion is generated by a solid state PZT actuators (piezoelectric linear actuator). Depending on the design, motion in linear, tilting and rotational form can be achieved: one-axis, two-axes (XY), 3-Axes (XYZ), 4-axes (XYZ-Theta), 5-axis (XYZ-tip/tilt) and 6-axis (XYZ, pitch, yaw and roll) can be achieved with very high precision. Nanopositioning is a combination of the words nano and positioning, meaning that motion with positioning resolution and precision in the nanometer range can be actuated and measured. For maximum accuracy, capacitance position feedback sensors are integrated into the piezo stages for feedback to the closed loop motion controller.
