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 All Categories    Piezo NanoAutomation® Stages with Direct Metrology
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors > Piezo Nanopositioning Systems > Single Axis Piezo Nanopositioning Systems > Piezo NanoAutomation® Stages with Direct Metrology > View Items  

Piezo NanoAutomation® Stages with Direct Metrology

 
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  • Ultra-Fast Response
  • Ultra-Precise Trajectory Control
  • Digital Controllers with Fast FiberLink Interface Available
  • ID-Chip for AutoCalibrate Function
  • Direct-Metrology Capacitive Sensors for Highest Precision
  • 0.1 nm Resolution
  • PICMA® High-Performance Multilayer Piezo Drives




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Item #

Item Name

Active Axes

Open Loop Resolution

Max. Normal Load

Travel Range

Closed Loop Linearity

Push Force Capacity (in Operating Direction)

Unloaded Resonant Frequency
P-752.1CD Piezo NanoAutomation® Stages with Direct Metrology X 0.10 nm 30 N 20 µm 0.03 % 100 N 3.20 kHz
P-752.2CD Piezo NanoAutomation® Stages with Direct Metrology X 0.20 nm 30 N 35 µm 0.03 % 100 N 2.10 kHz
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