- Ultra-High-Performance Closed-Loop Scanner for AFM/SPM
- Compact Manipulation Tool for Nanotechnology
- Resonant Frequency 9.8 kHz
- Ultra-High-Precision Capacitive Feedback
- Parallel-Motion Metrology for Highest Linearity and Stability
- 50 Picometers Resolution
- 5 x 5 x 5 µm Travel Range
- Very Small Package
- Rugged Design
