PI - Motion Control & Nanopositioning Solutions

Piezo Actuators
Nanopositioning & Scanning Systems
Active Optics /
Steering Mirrors
Capacitive Position Sensors
Piezo Drivers & Nanopositioning Controllers
Hexapods /
Motorized Positioners
Photonics Alignment Solutions
Motion Controllers
Ceramic Linear Motors & Stages

Search Catalog
 All Categories    PicoCube® High-Speed, XY(Z) Piezo Stages for Nanotechnology, SPM, AFM
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Multi-Axis Stages without Aperture > PicoCube® High-Speed, XY(Z) Piezo Stages for Nanotechnology, SPM, AFM > Item # P-363.3CD
    Printable Page     Email Email This Page     Save To Favorites Save To Favorites

Item # P-363.3CD, PicoCube® High-Speed, XY(Z) Piezo Stages for Nanotechnology, SPM, AFM

  • Ultra-High-Performance Closed-Loop Scanner for AFM/SPM
  • Compact Manipulation Tool for Nanotechnology
  • Resonant Frequency 9.8 kHz
  • Ultra-High-Precision Capacitive Feedback
  • Parallel-Motion Metrology for Highest Linearity and Stability
  • 50 Picometers Resolution
  • 5 x 5 x 5 µm Travel Range
  • Very Small Package
  • Rugged Design


Active Axes


Max. Normal Load

10 N

Weight (with Cables)

225 g ±5%

Body Material


Integrated Feedback Sensor


Tilt, Off-Axis (typ.)

0.5 µrad

Electrical Capacitance

X: 60 nF ±20%, Y: 60 nF ±20%
Z: 110 nF ±20%

Unloaded Resonant Frequency

3.1 kHz

Unloaded Resonant Frequency (Z)

9.8 kHz ±20%

Resonant Frequency at 20 g Load (X, Y)

1.5 kHz ±20%

Operating Temperature Range

-40 to +120 ºC

Voltage and Sensor Connection

Sub-D Special (P-363.xCL versions with Lemo connectors)

Recommended Amplifier / Controller

E-500 Rack, E-509, E-507.36 Amplifier

 CADs & Drawings, Manuals, Videos, Specs 

CADs & Drawings, Manuals, Videos, Specs

© 1996-2020 PI (Physik Instrumente) GmbH & Co. KG. All rights reserved. Specifications subject to change without notice.