- XY-Travel to 1000 µm
- Compact Design
- Resolution <1 nm
- Frictionless Precision Flexure Guiding System
- PICMA® High-Performance Multilayer Piezo Drives
- Direct Metrology with Capacitive Sensors for Highest Precision
- Up to 0.02% Position Accuracy
- X, XY, Z, XYZ Versions
- Vacuum-Compatible Versions
