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 All Categories    Low-Profile Z/Tip/Tilt Piezo Nanopositioning Stages for Microscopy with Parallel Metrology
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> Piezo Nanopositioning Systems > Z-/Tip/Tilt Stages (with Aperture) > Low-Profile Z/Tip/Tilt Piezo Nanopositioning Stages for Microscopy with Parallel Metrology > Item # P-541.ZCD
 
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Item # P-541.ZCD, Low-Profile Z/Tip/Tilt Piezo Nanopositioning Stages for Microscopy with Parallel Metrology



  • Lower Profile for Easy Integration: 16.5 mm
  • Z and Tip/Tilt Versions
  • Choice of Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
  • 100 µm Linear Travel Range, 1 mrad Tilt
  • 80 x 80 mm Clear Aperture
  • PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime
  • Ideal for fast Z-Stack Acquisition and 3D Deconvolution Imaging




 Specifications   

Active Axes

Z

Unloaded Resonant Frequency

.410 kHz

Max. Normal Load

20 N

Closed Loop Linearity

0.03 %

Integrated Feedback Sensor

Capacitive

Push Force Capacity

100 N

Pull Force Capacity

20 N

Electrical Capacitance

6.75 µF ±20%

Dynamic Operating Current Coefficient (DOCC)

View
8.5 µA/(Hz x µm)

Resonant Frequency at 185 g Load

300 Hz ±20%

Operating Temperature

-20 to 80 ºC

Voltage and Sensor Connection

View
D

Body Material

Al

Recommended Amplifier / Controller

H, F, L

Application

Biotechnology
Mask & wafer alignment

Micromanipulation

Scanning interferometry

Scanning microscopy

Surface metrology


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