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 All Categories    Low-Profile, Parallel-Kinematics XY Piezo Scanning Stages for Microscopy
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Multi-Axis Stages with Aperture > Low-Profile, Parallel-Kinematics XY Piezo Scanning Stages for Microscopy > Item # P-542.2SL
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Item # P-542.2SL, Low-Profile, Parallel-Kinematics XY Piezo Scanning Stages for Microscopy

  • Low Profile for Easy Integration: 16.5 mm
  • Parallel Kinematics for Fast Response
  • To 200 x 200 µm Travel Range
  • 80 x 80 mm Clear Aperture
  • PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime


Active Axes


Unloaded Resonant Frequency

.370 kHz

Max. Normal Load

20 N

Closed Loop Linearity

0.50 %

Integrated Feedback Sensor


Push Force Capacity

100 N

Pull Force Capacity

30 N

Electrical Capacitance (per Axis)

7.5 µF ±20%

Dynamic Operating Current Coefficient (DOCC)

4.8 µA/(Hz x µm)

Resonant Frequency at 185 g Load

250 Hz ±20%

Operating Temperature

-20 to 80 ºC

Voltage and Sensor Connection


Body Material


Recommended Amplifier / Controller

D, H


Mask & wafer alignment


Optical trapping

Scanning microscopy

Surface metrology

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