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  • Product Image - IHera Vertical Piezo Nanopositioning Stages with Direct Metrology
  • Z-Travel to 400 µm
  • Low Profile
  • Resolution <1 nm
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Multilayer Piezo Drives
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions
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Item #

Item Name

Active Axes

Open Loop Resolution

Max. Normal Load

Travel Range

Closed Loop Linearity

Unloaded Resonant Frequency

Push Force Capacity (X)

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N/A PIHera® Vertical Translation Stage for Nanopositioning, Piezo Drive and Direct Metrology N/A Z N/A 0.1 nm N/A 10 N N/A 65 µm N/A 0.02 % N/A 1 kHz N/A 10 N N/A Specifications, CAD / Drawings, Manuals, Videos
N/A PIHera® Vertical Translation Stage for Nanopositioning, Piezo Drive and Direct Metrology N/A Z N/A 0.2 nm N/A 10 N N/A 140 µm N/A 0.02 % N/A .790 kHz N/A 10 N N/A Specifications, CAD / Drawings, Manuals, Videos
N/A PIHera® Vertical Translation Stage for Nanopositioning, Piezo Drive and Direct Metrology N/A Z N/A 0.5 nm N/A 10 N N/A 400 µm N/A 0.02 % N/A .350 kHz N/A 10 N N/A Specifications, CAD / Drawings, Manuals, Videos
N/A PIHera® Vertical Translation Stage for Nanopositioning, Piezo Drive and Direct Metrology N/A Z N/A N/A N/A N/A N/A N/A N/A Specifications, CAD / Drawings, Manuals, Videos
N/A PIHera® Vertical Translation Stage for Nanopositioning, Piezo Drive and Direct Metrology N/A Z N/A N/A N/A N/A N/A N/A N/A Specifications, CAD / Drawings, Manuals, Videos
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