• P-604 Compact PiezoMove Linear Actuators

    Inexpensive, with 300 µm Travel Range

    Light and compact: 4 g and <13 mm × 20 mm surface
    Optimized design for manufacturing in large quantities
    Customer-specific adaptations can be provided
    Outstanding lifetime due to PICMA® piezo actuators
    Ideal for OEM applications in optics, medical technology, biotechnology, and microfluidics

    High guiding accuracy due to zero-play flexure guides
    Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

    Outstanding lifetime thanks to PICMA® piezo actuators
    The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

    These cost-effective motion amplified piezoelectric actuators use a clever integrated lever amplifier to increase the motion generated by the solid state piezoelectric stack actuator via a flexure system. The integrated ultra-reliable PICMA® PZT low-voltage piezo stacks have proven their performance in 100 billion cycles of life testing for the Mars mission. Due to the motion amplifier longer travel ranges in a more compact package can be achieved, while high resolution and fast response is still maintained. The compact size, affordability and high performance makes the P-604 amplified piezo actuators ideal for OEMs where highly precise motion for controlling, dosing or positioning is required. PZT nanopositioning actuators offer faster response than other types of electric or hydraulic actuators, while providing higher efficiency, zero maintenance and wear. Millisecond step and settle are achievable – a critical performance parameter for high performance control and nano-precision automation. The high velocity, step performance and responsiveness combined with the high resolution and accuracy makes piezo nanopositioning actuators the preferred choice in highly dynamic processes.

    When even higher stiffness, higher force, longer travel, and closed-loop operation are required, the P-602 PiezoMove amplified piezo actuator family is recommended. actuators
    Ideal for OEM applications in optics, medical technology, biotechnology, and microfluidics

    High guiding accuracy due to zero-play flexure guides
    Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

    Outstanding lifetime thanks to PICMA® piezo actuators
    The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

  • P-602 PiezoMove High-Stiffness Linear Piezo Actuators

    Inexpensive, with 300 µm Travel Range

    Light and compact: 4 g and <13 mm × 20 mm surface
    Optimized design for manufacturing in large quantities
    Customer-specific adaptations can be provided
    Outstanding lifetime due to PICMA® piezo actuators
    Ideal for OEM applications in optics, medical technology, biotechnology, and microfluidics

    High guiding accuracy due to zero-play flexure guides
    Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

    Outstanding lifetime thanks to PICMA® piezo actuators
    The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

    These cost-effective motion amplified piezoelectric actuators use a clever integrated lever amplifier to increase the motion generated by the solid state piezoelectric stack actuator via a flexure system. The integrated ultra-reliable PICMA® PZT low-voltage piezo stacks have proven their performance in 100 billion cycles of life testing for the Mars mission. Due to the motion amplifier longer travel ranges in a more compact package can be achieved, while high resolution and fast response is still maintained. The compact size, affordability and high performance makes the P-604 amplified piezo actuators ideal for OEMs where highly precise motion for controlling, dosing or positioning is required. PZT nanopositioning actuators offer faster response than other types of electric or hydraulic actuators, while providing higher efficiency, zero maintenance and wear. Millisecond step and settle are achievable – a critical performance parameter for high performance control and nano-precision automation. The high velocity, step performance and responsiveness combined with the high resolution and accuracy makes piezo nanopositioning actuators the preferred choice in highly dynamic processes.

    When even higher stiffness, higher force, longer travel, and closed-loop operation are required, the P-602 PiezoMove amplified piezo actuator family is recommended.

  • P-601 PiezoMove Linear Actuators with Guides

    With Optional Position Sensor

    Flexure guides for linear motion with minimum tip and tilt
    Available with integrated position sensors
    Outstanding lifetime due to PICMA® piezo actuators
    Ideal for OEM applications in optics, medical technology, biotechnology, and microfluidics
    Customized versions with longer travel range, shorter response time or nonmagnetic

    High guiding accuracy due to zero-play flexure guides
    Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

    Outstanding lifetime thanks to PICMA® piezo actuators
    The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

  • Product Image - IHera Vertical Piezo Nanopositioning Stages with Direct Metrology

    • Z-Travel to 400 µm
    • Low Profile
    • Resolution <1 nm
    • Frictionless Precision Flexure Guiding System
    • PICMA® High-Performance Multilayer Piezo Drives
    • Direct Metrology with Capacitive Sensors for Highest Precision
    • 0.02% Position Accuracy
    • X, XY, Z, XYZ Versions
    • Vacuum-Compatible Versions