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Z-Actuators


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P-604 Compact PiezoMove Linear Actuators

P-604 Compact PiezoMove Linear Actuators


Inexpensive, with 300 µm Travel Range

Light and compact: 4 g and <13 mm × 20 mm surface
Optimized design for manufacturing in large quantities
Customer-specific adaptations can be provided
Outstanding lifetime due to PICMA® piezo actuators
Ideal for OEM applications in optics, medical technology, biotechnology, and microfluidics

High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Outstanding lifetime thanks to PICMA® piezo actuators
The patented ...
P-602 PiezoMove High-Stiffness Linear Piezo Actuators

P-602 PiezoMove High-Stiffness Linear Piezo Actuators

(21)
With Guide for Travel Ranges to 1 mm

Flexure guides for linear motion with minimum tip and tilt
Stiff and backlash-free construction
Available with integrated position sensors
Outstanding lifetime due to PICMA® piezo actuators
Ideal OEM actuator for force generation in adaptive systems technology, for nanoimprint processes or machine tools
Customized versions with longer travel range, shorter response time or nonmagnetic

High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide ...
P-601 PiezoMove Linear Actuators with Guides

P-601 PiezoMove Linear Actuators with Guides

(8)
With Optional Position Sensor

Flexure guides for linear motion with minimum tip and tilt
Available with integrated position sensors
Outstanding lifetime due to PICMA® piezo actuators
Ideal for OEM applications in optics, medical technology, biotechnology, and microfluidics
Customized versions with longer travel range, shorter response time or nonmagnetic

High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Outstanding lifetime thanks to PICMA® piezo ...
Product Image - IHera Vertical Piezo Nanopositioning Stages with Direct Metrology

PIHera® Vertical Piezo Nanopositioning Stages with Direct Metrology

(5)
  • Z-Travel to 400 µm
  • Low Profile
  • Resolution <1 nm
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Multilayer Piezo Drives
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions


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