- Z-Travel to 400 µm
- Low Profile
- Resolution <1 nm
- Frictionless Precision Flexure Guiding System
- PICMA® High-Performance Multilayer Piezo Drives
- Direct Metrology with Capacitive Sensors for Highest Precision
- 0.02% Position Accuracy
- X, XY, Z, XYZ Versions
- Vacuum-Compatible Versions
