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High-Speed Piezo Tip/Tilt Platform and Z Positioner
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High-Speed Piezo Tip/Tilt Platform and Z Positioner
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Piezo Tripod Design Allows Z Motion and Tilt
10 mrad Optical Beam Deflection
Piston Movement up to 30 µm
Closed-Loop Versions for Better Linearity
For Mirrors up to 25 mm (1 inches) Diameter
Zero Friction Flexure Guides Single-Moving-Platform, Parallel-Kinematics Design: Equal Dynamics for all Axes, Better Linearity & Temperature Stability
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Item #
Item Name
Active Axes
Closed Loop Resolution
Open Loop Tilt Angle
Integrated Feedback Sensor
Closed Loop Tilt Angle
Open Loop Resolution
Unloaded Resonant Frequency
S-325.30L
High-Speed Piezo Tip/Tilt Platform and Z Positioner
Z
θX
θY
N/A
5
mrad
N/A
N/A
N/A
2
kHz
S-325.3SL
High-Speed Piezo Tip/Tilt Platform and Z Positioner
Z
θX
θY
1.00
nm
5
mrad
Strain Gauge Sensor
4.0
mrad
0.10
µrad
2
kHz
Results 1 - 2 of 2
1
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