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  • Piezo Tripod Design Allows Z Motion and Tilt
  • 10 mrad Optical Beam Deflection
  • Piston Movement up to 30 µm
  • Closed-Loop Versions for Better Linearity
  • For Mirrors up to 25 mm (1 inches) Diameter
  • Zero Friction Flexure Guides Single-Moving-Platform, Parallel-Kinematics Design: Equal Dynamics for all Axes, Better Linearity & Temperature Stability
Product Image - High-Speed Piezo Tip/Tilt Platform and Z Positioner
Unit of Measure
1 

Item #

Item Name

Active Axes

Closed Loop Resolution

Open Loop Tilt Angle

Integrated Feedback Sensor

Closed Loop Tilt Angle

Open Loop Resolution

Unloaded Resonant Frequency

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S-325.30L N/A Ultra-Fast Piezo Tip/Tilt Platform and Z Positioner N/A Z θX θY N/A N/A 5 mrad N/A N/A N/A N/A 2 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
S-325.3SL N/A Ultra-Fast Piezo Tip/Tilt Platform and Z Positioner N/A Z θX θY N/A 1.00 nm N/A 5 mrad N/A Strain Gauge Sensor N/A 4.0 mrad N/A 0.10 µrad N/A 2 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
Unit of Measure
1