(3)
Short Settling Time and High Dynamic Linearity
Tip/tilt angle to 35 mrad, high optical deflection angle to 70 mrad (4°) High resonant frequencies for dynamic motion and fast step-and-settle Parallel-kinematic design: Two orthogonal tip/tilt axes with one common center of rotation Strain sensors for high linearity Different versions available: Without mirror, 1/2" mirror, 1" mirror
High guiding accuracy due to zero-play flexure guides Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.