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 All Categories    PIHera® Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Single Axis Piezo Nanopositioning Systems > PIHera® Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology > Item # P-625.1CD
 
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Item # P-625.1CD, PIHera® Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology



  • Travel to 950 µm
  • Compact Design
  • Resolution <1 nm
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Piezo Drives
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Up to 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions




 Specifications   

Active Axes

X

Max. Normal Load

10 N

Closed Loop Linearity

0.03 %

Unloaded Resonant Frequency

.215 kHz

Weight (with Cables)

238 g ±5%

Integrated Feedback Sensor

Capacitive

Stiffness

0.10 N/µm

Push Force Capacity (X)

10 N

Pull Force Capacity (X)

8 N

Lateral Force Limit

10 N

Tilt (θY, θZ) (typ.)

6 µrad

Electrical Capacitance

6 µF ±20%

Dynamic Operating Current Coefficient (DOCC)

1.5 µA/(Hz x µm)

Resonant Frequency at 20 g Load

180 Hz ±20%

Resonant Frequency at 120 g Load

110 Hz ±20%

Operating Temperature Range

-40 to +120 ºC

Voltage Connection

D (Version .1CL with Lemo connectors)

Sensor Connection

D (Version .1CL with Lemo connectors)

Body Material

Al

Recommended Amplifier / Controller

F, M, L, H

Application

(Dynamic)interferometry
Biotechnology

Microscopy

Nanopositioning

Quality assurance

Semiconductor Technology


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