Item # |
Item Name |
Active Axes |
Closed Loop Linearity |
Open Loop Resolution |
Max. Normal Load |
Travel Range |
Integrated Feedback Sensor |
Unloaded Resonant Frequency |
Click Link for More Information |
---|---|---|---|---|---|---|---|---|---|
S-303.CDx | N/A High Speed Piezo Phase Shifter with Direct Metrology Option | N/A Z | N/A 0.03 % | N/A 0.03 nm | N/A 0.5 N | N/A 3 µm | N/A Capacitive | N/A 25.00 kHz |
N/A Specifications, CAD / Drawings, Manuals, Videos |
S-303.0Lx | N/A High Speed Piezo Phase Shifter with Direct Metrology Option | N/A Z | N/A | N/A 0.03 nm | N/A 0.5 N | N/A 3 µm | N/A | N/A 25.00 kHz |
N/A Specifications, CAD / Drawings, Manuals, Videos |