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 All Categories    High Speed Piezo Phase Shifters with Direct Metrology Option
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Steering Mirrors / Active Optics > Single-Axis Platforms / Shifters > High Speed Piezo Phase Shifters with Direct Metrology Option > Item # S-303.CDx
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Item # S-303.CDx, High Speed Piezo Phase Shifters with Direct Metrology Option

  • 25 kHz Resonant Frequency for Sub-Millisecond Dynamics
  • <0.1 Nanometer Resolution
  • Capacitive Sensor Option for Highest Linearity and Stability
  • Invar Option for Highest Thermal Stability
  • Aperture with Open-Loop Versions
  • 3 µm Travel Range
  • Compact Size : 30 mm Diameter x 10 mm


Active Axes


Closed Loop Linearity

0.03 %

Max. Normal Load

0.5 N

Integrated Feedback Sensor


Operating Temperature Range

-20 to 80 ºC

Body Material


Electrical Capacitance

0.9 µF ±20%

Dynamic Operating Current Coefficient (DOCC)

50 µA/(Hz x µm)

Unloaded Resonant Frequency

25.00 kHz

Voltage Connection


Sensor Connection



100 g ±5%

Recommended Amplifier / Controller

F, M


Beam stabilization
Cavity tuning


Laser physics

Optical path tuning

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