- 25 kHz Resonant Frequency for Sub-Millisecond Dynamics
- <0.1 Nanometer Resolution
- Capacitive Sensor Option for Highest Linearity and Stability
- Invar Option for Highest Thermal Stability
- Aperture with Open-Loop Versions
- 3 µm Travel Range
- Compact Size : 30 mm Diameter x 10 mm
