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 All Categories    Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology
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> Piezo Nanopositioning Systems > Multi-Axis Stages with Aperture > Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology > View Items
 

Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology

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  • XYø XYZ and XY Versions
  • Precision Trajectory Control
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Travel Ranges to 200 µm
  • Clear Aperture to 66 x 66 mm
  • PICMA® High-Performance Multilayer Piezo Drives




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  Results 1 - 6 of 6 1 

Item #

Item Name

Active Axes

Open Loop Resolution

Max. Normal Load

Travel Range

Closed Loop Linearity

Push Force Capacity (in Operating Direction)

Unloaded Resonant Frequency

Closed Loop Resolution

P-517.2CL Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology XY 0.30 nm 50 N 100 µm 0.03 % 200 N .450 kHz 1.00 nm
P-527.2CL Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology XY 0.30 nm 50 N 200 µm 0.03 % 200 N 0.350 kHz 2.00 nm
P-517.3CD Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology XYZ 0.30 nm 50 N 100 µm 0.03 % 200 N .450 kHz 0.30 nm
1.00
nm
P-527.3CD Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology XYZ 0.30 nm 50 N 200 µm 0.03 % 200 N .350 kHz 0.50 nm
2.00
nm
P-517.RCD Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology XYΘZ 0.30 nm 50 N 100 µm 0.03 % 200 N .450 kHz 1.00 nm
P-527.RCD Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology XYΘZ 0.50 nm 50 N 200 µm 0.03 % 200 N .350 kHz 2.00 nm
  Results 1 - 6 of 6 1 


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