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 All Categories    Multi-Axis Stages with Aperture
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Multi-Axis Stages with Aperture
 
 

Multi-Axis Stages with Aperture


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Product Image - Low-Profile OEM XY Piezo-Scanners for Imaging Applications

Low-Profile OEM XY Piezo-Scanners for Imaging Applications

(3)
  • Ideal for Interlacing, CCD Resolution Enhancement
  • Compact Size of only 45 x 45 x 6 mm
  • Clear Aperture
  • Highly Cost - Efficient Design
  • 15 x 15 µm Travel Range
  • Parallel - Kinematics Design for Higher Dynamics
Product Image - Compact XY Piezo-Nanopositioner with Aperture

Compact XY Piezo-Nanopositioner with Aperture

(2)
  • Small Footprint : 60 x 60 mm
  • 100 x 100 µm Travel Range
  • Resolution to 0.8 nm
  • For Cost-Sensitive Applications
  • Clear Aperture: 20 x 20 mm
  • PICMA ® High-Performance Multilayer Piezo Actuators
  • Z-Stage also Available
Product Image - Low-Profile, XY Piezo Scanning Microscopy Stages with Parallel Metrology

Low-Profile, Parallel-Kinematics XY Piezo Scanning Stages for Microscopy

(4)
  • Low Profile for Easy Integration: 16.5 mm
  • Parallel Kinematics for Fast Response
  • To 200 x 200 µm Travel Range
  • 80 x 80 mm Clear Aperture
  • PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime
Product Image - Low-Profile, XY Piezo Scanning Microscopy Stages with Parallel Metrology

Low-Profile, XY Piezo Scanning Microscopy Stages with Parallel Metrology

(3)
  • Low Profile for Easy Integration: 16.5 mm
  • Parallel Kinematics and Optional Parallel Metrology for Fast Response and Superior Multi-Axis Precision
  • Choice of Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
  • To 200 x 200 µm Travel Range
  • Direct Drive Version for High-Speed Positioning & Scanning
  • 80 x 80 mm Clear Aperture
  • PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime
Product Image - Ultra-High-Speed, XY / XYZ Scanning Microscopy Stages with Parallel Metrology

Ultra-High-Speed, XY / XYZ Scanning Microscopy Stages with Parallel Metrology

(2)
  • Higher Speed Through Direct Drive
  • Up to 2.2 kHz Resonant Frequency in X and Y
  • 30 x 30 or 30 x 30 x 10 µm Travel Range
  • 100 Picometers Resolution
  • Capacitive Sensors for Highest Linearity
  • Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Active Runout Compensation
  • 50 x 50 mm Clear Aperture
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Multilayer Piezo Drives
Product Image - XY Piezo Nanopositioning / Scanning Stages with Parallel Metrology

XY Piezo Nanopositioning / Scanning Stages With Parallel Metrology


  • 100 x 100 µm Travel Range
  • For XY Scanning & Positioning
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Precision Flexure-Guiding System
  • Integrated Capacitive Sensors for Resolution <0.3 nm
  • 50 x 50 mm Clear Aperture
  • Ultra-High Vacuum Version Available
  • Ultra-Fast XY and XYZ Versions Available
  • PICMA® High-Performance Multilayer Piezo Drives
Product Image - Ultra-Precision Trajectory, XY Nanopositioning Stages with Parallel Metrology

Ultra-Precision Trajectory, XY Nanopositioning Stages with Parallel Metrology


  • Ultra-Precision Trajectory Control, Ideal for Surface Analysis and Scanning Microscopy
  • Flatness in the Low Nanometer Range
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness and Automatic Runout Compensation
  • 100 x 100 µm Travel Range
  • Direct-Metrology Capacitive Sensors for Higher Precision
  • 56 x 56 mm Clear Aperture
  • PICMA®High-Performance Multilayer Piezo Drives
Product Image - Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology

Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology

(6)
  • XYø XYZ and XY Versions
  • Precision Trajectory Control
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Travel Ranges to 200 µm
  • Clear Aperture to 66 x 66 mm
  • PICMA® High-Performance Multilayer Piezo Drives
Product Image - NanoCube XYZ Piezo NanoAlignment Systems with Parallel Metrology

NanoCube® XYZ Piezo Nano Alignment Systems with Parallel Metrology

(3)
  • 350 x 350 x 250 µm Closed-Loop Travel Range
  • Parallel-Kinematics Design & Direct Capacitive Metrology for Higher Multi-Axis Accuracy
  • Compact Design : 80 x 80 x 42 mm (Open & Closed-Loop Versions)
  • 10 mm Clear Aperture
  • PICMA® High-Performance Multilayer Piezo Drives
  • 1 nm Resolution
  • Ideal for Alignment and Photonics Packaging Applications Vacuum Compatible to 10-6 hPa
Product Image - PIMars XYZ Piezo Scanning- and Nanopositioning Stages with Parallel Metrology

PIMars™ XYZ Piezo Scanning- and Nanopositioning Stages with Parallel Metrology

(4)
  • To 300 x 300 x 300 µm Travel Range
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • 66 x 66 mm Clear Aperture
  • Versions to 6-DOF
  • Ultra-Fast XY and XYZ Versions Available
  • Ultra-High-Vacuum Versions up to 10-9 hPa Available
  • Invar, Super-Invar and Titanium Versions Available
  • PICMA® High-Performance Multilayer Piezo Drives
Product Image - Large-Aperture, XY Piezo Nanopositioning / Scanning Stage with Parallel Metrology

Large-Aperture, XY Piezo Nanopositioning / Scanning Stage with Parallel Metrology


  • Precision Trajectory Control
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • For XY Scanning and Positioning
  • 200 x 200 mm Clear Aperture
  • 200 x 200 µm Range
  • Closed-Loop Resolution <10 nm
  • PICMA® High-Performance Multilayer Piezo Drives


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