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 All Categories    Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Multi-Axis Stages with Aperture > Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology > Item # P-527.2CL
 

Item # P-527.2CL, Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology


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  • XYø XYZ and XY Versions
  • Precision Trajectory Control
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Travel Ranges to 200 µm
  • Clear Aperture to 66 x 66 mm
  • PICMA® High-Performance Multilayer Piezo Drives




 Specifications   

Active Axes

XY

Open Loop Resolution

0.30 nm

Max. Normal Load

50 N

Travel Range

200 µm

Closed Loop Linearity

0.03 %

Push Force Capacity (in Operating Direction)

200 N

Unloaded Resonant Frequency

0.350 kHz

Closed Loop Travel Range

200 µm

Integrated Feedback Sensor

2 x Capacitive

Closed Loop Resolution

2.00 nm

Full-Range Repeatability (typ.)

±10 nm

Stiffness

1 N/µm ±20%

Pull Force Capacity (in Operating Direction)

30 N

Electrical Capacitance

9 µF ±20% / axis

Dynamic Operating Current Coefficient (DOCC)

View
5.5 µA/(Hz x µm) / axis

Resonant Frequency at 500 g Load

190 Hz ±20%

Resonant Frequency at 2500 g Load

110 Hz ±20%

Operating Temperature Range

-20 to +80 °C

Voltage Connection

2 x VL

Sensor Connection

View
4 x C

Weight (with Cables)

1400 g ±5%

Body Material

Al

Recommended Amplifier / Controller

H, F, L, K

Application

Biotechnology
Disk drive testing

Laser technology

Lithography

Metrology

Nanopositioning

Optical trapping

Scanning microscopy


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·  Dimensional Drawing


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Description/Datasheet




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