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 All Categories    PIMars™ XYZ Piezo Scanning- and Nanopositioning Stages with Parallel Metrology
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Multi-Axis Stages with Aperture > PIMars™ XYZ Piezo Scanning- and Nanopositioning Stages with Parallel Metrology > View Items
 

PIMars™ XYZ Piezo Scanning- and Nanopositioning Stages with Parallel Metrology

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  • To 300 x 300 x 300 µm Travel Range
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • 66 x 66 mm Clear Aperture
  • Versions to 6-DOF
  • Ultra-Fast XY and XYZ Versions Available
  • Ultra-High-Vacuum Versions up to 10-9 hPa Available
  • Invar, Super-Invar and Titanium Versions Available
  • PICMA® High-Performance Multilayer Piezo Drives





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Item #

Item Name

Active Axes

Open Loop Resolution

Max. Normal Load

Travel Range

Closed Loop Linearity

Push Force Capacity (X)

Unloaded Resonant Frequency

P-561.3CD PIMars™ XYZ Piezo Scanning- and Nanopositioning Stages with Parallel Metrology XYZ 0.20 nm 50 N 150 µm 0.03 % 200 N 190 kHz
P-562.3CD PIMars™ XYZ Piezo Scanning- and Nanopositioning Stages with Parallel Metrology XYZ 0.40 nm 50 N 220 µm 0.03 % 120 N 170 kHz
P-563.3CD PIMars™ XYZ Piezo Scanning- and Nanopositioning Stages with Parallel Metrology XYZ 0.70 nm 50 N 350 µm 0.03 % 100 N 120 kHz
P-561.3DD PIMars™ XYZ Piezo Scanning- and Nanopositioning Stages with Parallel Metrology XYZ 0.10 nm 50 N 55 µm 0.01 % 200 N 920 kHz
  Results 1 - 4 of 4 1 


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