- To 300 x 300 x 300 µm Travel Range
- Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
- Direct Metrology with Capacitive Sensors for Highest Precision
- 66 x 66 mm Clear Aperture
- Versions to 6-DOF
- Ultra-Fast XY and XYZ Versions Available
- Ultra-High-Vacuum Versions up to 10-9 hPa Available
- Invar, Super-Invar and Titanium Versions Available
- PICMA® High-Performance Multilayer Piezo Drives
- Available as XY-version (P-561.2DD) with 20% higher resonant frequency