• Six Degrees of Freedom
  • Rapid Response
  • No Moving Cables for Improved Reliability and Precision
  • 10 kg Load Capacity
  • Repeatability to ±2 µm
  • Actuator Resolution to 0.016 µm
  • Significantly Smaller and Stiffer than Serial-Kinematics Systems, Better Dynamics
  • Vacuum-Compatible Versions
  • Virtualized Pivot Point
  • Sophisticated Controller Using Vector Algorithms
  • 20000 h MTBF
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Item #

Item Name

Travel Range X, Y

Travel Range Z

Travel Range θX, θY

Travel Range θZ

Min. Incremental Motion X, Y

Max. Speed

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N/A 6-Axis Stage, Hexapod Microrobot, Parallel Kinematics N/A ±50 mm N/A ±25 mm N/A ±15 ° N/A ±30 ° N/A 3 µm N/A 50 mm/s N/A Specifications, CAD / Drawings, Manuals, Videos
N/A 6-Axis Stage, Hexapod Microrobot, Parallel Kinematics N/A ±50 mm N/A ±25 mm N/A ±15 ° N/A ±30 ° N/A 1 µm N/A 2.5 mm/s N/A Specifications, CAD / Drawings, Manuals, Videos
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