6-Axis Stage, Hexapod Parallel Microrobot, Alignment System

Six Degrees of Freedom
Rapid Response
No Moving Cables for Improved Reliability and Precision
10 kg Load Capacity
Repeatability to ±2 µm
Actuator Resolution to 0.016 µm
Significantly Smaller and Stiffer than Serial-Kinematics Systems, Better Dynamics
Vacuum-Compatible Versions
Virtualized Pivot Point
Sophisticated Controller Using Vector Algorithms
20000 h MTBF

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Item #	Item Name	Travel Range X, Y	Travel Range Z	Travel Range θX, θY	Travel Range θZ	Min. Incremental Motion X, Y	Max. Speed	Click Link for More Information

M-840.5PD	N/A 6-Axis Stage, Hexapod Microrobot, Parallel Kinematics	N/A ±50 mm	N/A ±25 mm	N/A ±15 °	N/A ±30 °	N/A 3 µm	N/A 50 mm/s	N/A Specifications, CAD / Drawings, Manuals, Videos
M-840.5DG	N/A 6-Axis Stage, Hexapod Microrobot, Parallel Kinematics	N/A ±50 mm	N/A ±25 mm	N/A ±15 °	N/A ±30 °	N/A 1 µm	N/A 2.5 mm/s	N/A Specifications, CAD / Drawings, Manuals, Videos

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