Item # |
Item Name |
Travel Range X, Y |
Travel Range Z |
Travel Range θX, θY |
Travel Range θZ |
Min. Incremental Motion X, Y |
Max. Speed |
Click Link for More Information |
---|---|---|---|---|---|---|---|---|
M-840.5PD | N/A 6-Axis Stage, Hexapod Microrobot, Parallel Kinematics | N/A ±50 mm | N/A ±25 mm | N/A ±15 ° | N/A ±30 ° | N/A 3 µm | N/A 50 mm/s |
N/A Specifications, CAD / Drawings, Manuals, Videos |
M-840.5DG | N/A 6-Axis Stage, Hexapod Microrobot, Parallel Kinematics | N/A ±50 mm | N/A ±25 mm | N/A ±15 ° | N/A ±30 ° | N/A 1 µm | N/A 2.5 mm/s |
N/A Specifications, CAD / Drawings, Manuals, Videos |