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 All Categories    V-522, V-524, and V-528 High-Dynamics PIMag® Linear Stages
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Motorized Stages, Hexapods, Controllers > Micropositioning Actuators / Stages > Linear Translation Stages > V-522, V-524, and V-528 High-Dynamics PIMag® Linear Stages > View Items  
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V-522, V-524, and V-528 High-Dynamics PIMag® Linear Stages

 
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Voice coil direct drive with direct position measuring

Fast scanning and positioning

Crossed roller bearings for the highest precision

Reference-class linear stage
Linear stages with magnetic direct drives largely dispense with mechanical components in the drivetrain and the drive force acts directly on the motion platform. Together with precision bearings, a high travel accuracy and longer lifetime is achieved. The linear stages are particularly suitable for scanning applications.

Crossed roller guide
With crossed roller guides, the point contact of the balls in ball guides is replaced by line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller guides are also distinguished by high guiding accuracy and load capacity. Force-guided rolling element cages prevent cage creep.

Fields of application
Industry and research. Metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing

PIMag® voice coil
Voice coil drives consist of 2 essential components: A permanent magnet and a coil that is located in the air gap of the magnetic field. When current flows through the coil, it moves in the magnetic field of the permanent magnet. The direction of motion depends on the polarity. Thanks to their low weight and friction-free drive principle, voice coil drives are particularly suitable for applications, which require high dynamics and high velocities at limited travel ranges. High scan frequencies and precision positioning are also possible with these drives, because they are free of the effects of hysteresis.

Highly accurate position measuring with incremental linear encoder
Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.


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Item #

Item Name

Sensor Resolution

Min. Incremental Motion (typ.)

Bidirectional Repeatability (typ.)

Pitch (max.)
V-522.1AA V-522, V-524, and V-528 High-Dynamics PIMag® Linear Stages 10 nm 20 nm ±120 nm ±50 µrad
V-522.1AB V-522, V-524, and V-528 High-Dynamics PIMag® Linear Stages 10 nm 20 nm ±120 nm ±50 µrad
V-524.1AA V-522, V-524, and V-528 High-Dynamics PIMag® Linear Stages 10 nm 20 nm ±120 nm ±100 µrad
V-524.1AB V-522, V-524, and V-528 High-Dynamics PIMag® Linear Stages 10 nm 20 nm ±120 nm ±100 µrad
V-528.1AA V-522, V-524, and V-528 High-Dynamics PIMag® Linear Stages 10 nm 20 nm ±120 nm ±200 µrad
V-528.1AB V-522, V-524, and V-528 High-Dynamics PIMag® Linear Stages 10 nm 20 nm ±120 nm ±200 µrad
  Results 1 - 6 of 6 1 


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