• 0.05 µm Minimum Incremental Motion
• 5, 15 and 25 mm Travel Ranges
• Velocity to 1.5 mm/sec.
• Closed - Loop DC Motors and Stepper Motors
• Integrated Hall - Effect Limit and Reference Switches

• 5 to 25 mm Travel Ranges
• 5000 h MTBF
• Very Cost Effective
• 200 nm Minimum Inc. Motion
• Hall - Effect Limit & Reference Switches
• Recirculating Ballscrew for Extended Lifetime

Inexpensive, with linear motor

Iron core 3-phase linear motor

Crossed roller guides for high load capacity

Compact design

Low price

PIMag® magnetic direct drive
3-phase magnetic direct drives do not use mechanical components in the drivetrain, they transmit the drive force to the motion platform directly and without friction. The drives reach high velocities and accelerations. Iron core motors are used when forces and accelerations need to be achieved in a limited installation space. The design with iron cores maximizes the magnetic forces and ensures high thermal stability of the drive.

Direct position measurement
Position measuring takes place directly at the motion platform with the highest accuracy so that nonlinearity, mechanical play or elastic deformation have no influence on position measuring.

Crossed roller guide
With crossed roller guides, the point contact of the balls in ball guides is replaced by line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller guides are also distinguished by high guiding accuracy and load capacity. Force-guided rolling element cages prevent cage creep.

Application fields
Industry and research. Automation technology with high demands on dynamics and precision.

Voice coil direct drive with direct position measuring

Fast scanning and positioning

Crossed roller bearings for the highest precision

Reference-class linear stage
Linear stages with magnetic direct drives largely dispense with mechanical components in the drivetrain and the drive force acts directly on the motion platform. Together with precision bearings, a high travel accuracy and longer lifetime is achieved. The linear stages are particularly suitable for scanning applications.

Crossed roller guide
With crossed roller guides, the point contact of the balls in ball guides is replaced by line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller guides are also distinguished by high guiding accuracy and load capacity. Force-guided rolling element cages prevent cage creep.

Fields of application
Industry and research. Metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing

PIMag® voice coil
Voice coil drives consist of 2 essential components: A permanent magnet and a coil that is located in the air gap of the magnetic field. When current flows through the coil, it moves in the magnetic field of the permanent magnet. The direction of motion depends on the polarity. Thanks to their low weight and friction-free drive principle, voice coil drives are particularly suitable for applications, which require high dynamics and high velocities at limited travel ranges. High scan frequencies and precision positioning are also possible with these drives, because they are free of the effects of hysteresis.

Highly accurate position measuring with incremental linear encoder
Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

• For Cost-Sensitive Applications
• Resolution <0.02 µm
• Min. Incremental Motion 0.2 µm
• Travel Range to 100 mm
• Stress-Relieved Aluminum Base for Highest Stability
• Zero-Backlash Recirculating Ball Bearings
• Lead-Screw-Driven

• Integrated Linear-Scale Encoders for Highest Accuracy
• Travel Ranges 25 mm (1") and 50 mm (2")
• Velocity up to 50 mm/sec.
• Active Drive™ Motors
• Compatible with Leading Industrial Motion Controllers
• Stress-Relieved Aluminum Stage Base for Highest Stability
• Zero-Backlash Recirculating Ballscrews
• Non-Contact, Direction-Sensing Origin Switch
• Non-Contact Limit Switches
• Load Capacity 20 kg
• >20,000 Hours MTBF

High travel accuracy

Active Drive DC, BLDC, and DC gear motor

Stepper motor

Optional: Linear encoder for direct position measuring

Direction-sensing reference switch

Reference-class linear stage
High travel accuracy and load capacity thanks to recirculating ball bearing guides. Precision ball screw with 2 mm pitch. Stress-relieved aluminum base for highest stability. Noncontact optical limit switches. Noncontact optical reference switch with direction sensing in the middle of the travel range.

Application fields
Autofocus. Laser cutting. Research. Biotechnology. Automation. Vacuum. Optical alignment.

Highly accurate position measuring with incremental linear encoder
Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Compact Design, for Loads to 10 kg

Optional: Direct-measuring linear encoder

ActiveDrive DC, BLDC, DC gear motor, stepper motor

Direction-sensing reference switch

Variants suitable for vacuum available

High travel accuracy and load capacity due to crossed roller guides with anti-creep system. Precision ball screw with 1 mm pitch. Compact design. Stress-relieved aluminum base for highest stability. Noncontact optical limit switches. Noncontact optical reference switch with direction sensing in the middle of the travel range.

Application fields
Autofocus. Laser cutting. Research. Biotechnology. Automation. Vacuum. Optical alignment.

Highly accurate position measuring with incremental linear encoder
Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

V-528 High-Dynamics PIMag® Linear Stage - Voice Coil Direct Drive With Direct Position Measurement

• Fast Scanning and Positioning
• Max. velocity 250 mm/s
• Travel Ranges 5, 10, and 20mm
• Scanning Frequency 10s of Hz
• Linear Encoder, 0.1 Micrometers Resolution
• Crossed Roller Bearings
• Recommended controller: C-413