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 All Categories    Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology
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Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Z-/Tip/Tilt Stages (with Aperture) > Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology > View Items
 
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Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology

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  • Precision Trajectory Control
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Travel Ranges to 200 µm / 4 mrad
  • Clear Aperture 66 x 66 mm
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • PICMA® High-Performance Multilayer Piezo Drives



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  Results 1 - 9 of 9 1 

Item #

Item Name

Active Axes

Max. Normal Load

Travel Range

Closed Loop Linearity

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Push Force Capacity (in Operating Direction)

Unloaded Resonant Frequency

P-528 Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology Z 50 N Up to 4 mrad 0.03 % Z: 100 N .570 kHz
P-558.ZCD Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology Z 50 N Up to 4 mrad 0.03 % Z: 100 N .570 kHz
P-518.ZCL Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology Z 50 N Up to 4 mrad 0.03 % Z: 100 N .5 kHz
P-518.ZCD Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology Z 50 N Up to 4 mrad 0.03 % Z: 100 N .5 kHz
P-528.ZCL Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology Z 50 N Up to 4 mrad 0.03 % Z: 100 N .350 kHz
P-528.ZCD Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology Z 50 N Up to 4 mrad 0.03 % Z: 100 N .350 kHz
P-558.TCD Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology ZΘXΘY 50 N Up to 4 mrad 0.03 % Z: 100 N .570 kHz
P-518.TCD Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology ZΘXΘY 50 N Up to 4 mrad 0.03 % Z: 100 N .5 kHz
P-528.TCD Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology ZΘXΘY 50 N Up to 4 mrad 0.03 % Z: 100 N .350 kHz
  Results 1 - 9 of 9 1 


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